Epileptic focus positioning deep brain flexible micro-nano electrode array and preparation method thereof
A micro-electrode array, electrode array technology, applied in the direction of head electrodes, internal electrodes, electrodes, etc., can solve the problems of flexible brain tissue damage, inflammatory response, and large difference in Young's modulus, and achieve the effect of precise positioning
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[0059] Figure 4 It is a process flow chart of the preparation method of the deep brain flexible micro-nano electrode array for epileptic focus localization according to the embodiment of the present invention. Such as Figure 4 As shown, a method for preparing an epileptic focus deep brain flexible micro-nano electrode array includes the following steps:
[0060] Step 1, depositing a Parylene (parylene) film with a thickness of 10 μm to 20 μm on the surface of the silicon wafer after surface cleaning to form a flexible base layer, such as Figure 4 Shown in (a).
[0061] Step 2. Spin-coat reverse adhesive AZ5214 on the surface of Parylene activated by oxygen plasma, with a thickness of 1.5 μm, pre-baking on a hot plate at 100 ° C, mask exposure, reverse baking on a hot plate at 120 ° C, pan exposure, development, A patterned photoresist mask is obtained after hardening the film in an oven at 80 degrees Celsius, such as Figure 4 Shown in (b).
[0062] Step 3, sputtering ...
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