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Epileptic focus positioning deep brain flexible micro-nano electrode array and preparation method thereof

A micro-electrode array, electrode array technology, applied in the direction of head electrodes, internal electrodes, electrodes, etc., can solve the problems of flexible brain tissue damage, inflammatory response, and large difference in Young's modulus, and achieve the effect of precise positioning

Pending Publication Date: 2021-07-30
AEROSPACE INFORMATION RES INST CAS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The Young’s modulus of the commonly used rigid silicon-based electrodes is quite different from that of the brain tissue, which will cause certain damage to the flexible brain tissue and trigger an inflammatory response
Moreover, silicon-based electrodes are brittle and easy to damage

Method used

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  • Epileptic focus positioning deep brain flexible micro-nano electrode array and preparation method thereof
  • Epileptic focus positioning deep brain flexible micro-nano electrode array and preparation method thereof
  • Epileptic focus positioning deep brain flexible micro-nano electrode array and preparation method thereof

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preparation example Construction

[0059] Figure 4 It is a process flow chart of the preparation method of the deep brain flexible micro-nano electrode array for epileptic focus localization according to the embodiment of the present invention. Such as Figure 4 As shown, a method for preparing an epileptic focus deep brain flexible micro-nano electrode array includes the following steps:

[0060] Step 1, depositing a Parylene (parylene) film with a thickness of 10 μm to 20 μm on the surface of the silicon wafer after surface cleaning to form a flexible base layer, such as Figure 4 Shown in (a).

[0061] Step 2. Spin-coat reverse adhesive AZ5214 on the surface of Parylene activated by oxygen plasma, with a thickness of 1.5 μm, pre-baking on a hot plate at 100 ° C, mask exposure, reverse baking on a hot plate at 120 ° C, pan exposure, development, A patterned photoresist mask is obtained after hardening the film in an oven at 80 degrees Celsius, such as Figure 4 Shown in (b).

[0062] Step 3, sputtering ...

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Abstract

The invention provides an epileptic focus positioning deep brain flexible micro-nano electrode array and a preparation method thereof. The epileptic focus positioning deep brain flexible micro-nano electrode array sequentially comprises a substrate layer, a conductive layer and an insulating layer from bottom to top. The substrate layer and the insulating layer are made of flexible materials with biocompatibility and are in a sharp knife type outline; the conductive layer comprises a microelectrode array and a bonding pad; the microelectrode array comprises a plurality of detection sites; the plurality of detection sites are longitudinally distributed in a staggered manner and longitudinally cross a hippocampal brain region and a cortical brain region; the bonding pad is connected with the microelectrode array through a lead; the insulating layer covers the lead and exposes the microelectrode array and the bonding pad. According to the invention, the flexible micro-nano electrode array is utilized to simultaneously detect, regulate and control single cell action potential signals, cell population field potential signals and real-time fluctuating neurotransmitter signals of cross-sea horses and corticoencephalic regions, which is beneficial to analysis of space-time diffusion of epileptic activities and realization of accurate positioning of epileptic lesions, so that surgical planning and navigation are guided.

Description

technical field [0001] The disclosure relates to the field of micromachining of biosensors, in particular to a flexible micro-nano electrode array for locating epilepsy foci deep in the brain and a preparation method thereof. Background technique [0002] Epilepsy is a common neurological disorder characterized by recurrent abnormal electrical discharges in the brain accompanied by tonic limb convulsions and confusion. Due to the complex mechanism of epilepsy, the detection and localization of epilepsy are still key issues to be solved. [0003] The cerebral cortex and hippocampus are the key focus areas of epileptic seizures. The cortical brain area receives signals from other tissues, integrates and transmits information to the hippocampal subregion; the hippocampal brain area is responsible for cognition, learning and memory functions. Among them, the electrophysiological and electrochemical activities of neurons carry a large amount of information, and show obvious abn...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61N1/05A61N1/36C23C14/04C23C14/16C23C14/58
CPCA61N1/0531A61N1/0534A61N1/36064C23C14/042C23C14/165C23C14/5873
Inventor 李欣蓉蔡新霞宋轶琳王怡丁肖桂花
Owner AEROSPACE INFORMATION RES INST CAS
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