High-thickness curved-surface DLC product and preparation method and application thereof

A technology for products and curved surfaces, applied in the field of high-thickness curved DLC products and their preparation, can solve the problems of inability to prepare high-thickness curved DLC products, and achieve the effects of small internal stress and high adhesion

Active Publication Date: 2021-08-20
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention provides a method for preparing high-thickness curved DLC products i

Method used

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  • High-thickness curved-surface DLC product and preparation method and application thereof
  • High-thickness curved-surface DLC product and preparation method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] S1. Place the cleaned metal tube or metal rod in the PVD furnace, and vacuumize it to 1×10 -3 Pa; Turn on the graphite target source and ion source power supply, apply negative bias, and deposit at -10V, 10A for 20h; -20V, 9A for 15h; -25V, for 8A for 10h; -30V, for 6A for 8h; -50V, for 5A 6h; -60V, 4A deposition for 4h; -80V, 3A deposition for 2h; -100V, 3A deposition for 1h; a metal tube containing a DLC layer or a metal rod containing a DLC layer was obtained.

[0038] S2. The product obtained in step S2 is electrolytically corroded until the metal tube or metal rod is completely corroded to obtain a DLC tube; the current is 10A, the corrosion temperature is 65° C., and the corrosion solution is mixed with 10 vol.% NaCl solution. The resulting thickness of the DLC tube was 880 μm. From figure 1 It can be seen that the DLC tube is not cracked.

Embodiment 2

[0040] The preparation method of Example 2 is the same as that of Example 1, the difference is that the deposition bias and deposition time are adjusted, the negative substrate bias is -12V for 21 hours; -20V for 15 hours; -26V for 10 hours; -30V for 8 hours; -50V for deposition 6h; -60V deposition for 4h; -80V deposition for 2h; -100V deposition for 1h, and the thickness of the DLC tube was 480μm.

Embodiment 3

[0042] The preparation method of Example 3 is the same as that of Example 1, the difference is that the deposition bias and deposition time are adjusted, and the substrate negative bias is -10V for 15 hours; -15V for 12 hours; -20V for 10 hours; -30V for 6 hours; -50V for deposition 5h; -60V deposition 4h; -80V deposition 3h; -100V deposition 2h. The DLC tube thickness is 510 μm.

[0043] It can be seen from Examples 1-3 that DLC tubes with different thicknesses can be obtained by adjusting different deposition biases and deposition times.

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PUM

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Abstract

The invention discloses a high-thickness curved-surface DLC product and a preparation method and application thereof. The preparation method comprises the following steps that S1, a substrate is placed in a PVD furnace, a graphite target source and an ion source power source are started, deposition bias voltage ranging from -10 V to -100 V is applied and is increased in a gradient mode, current is adjusted to be decreased in a gradient mode from 10 A to 3 A, and deposition is performed for 50-90 hours to obtain a DLC layer containing the substrate; and S2, the product obtained in the step S1 is corroded to remove the substrate to obtain the high-thickness curved-surface DLC product. The high-thickness curved-surface DLC product has no cracking or shedding phenomenon.

Description

technical field [0001] The invention relates to the technical field of DLC, more specifically, to a high-thickness curved surface DLC product and its preparation method and application. Background technique [0002] Heat exchangers are very important in industrial applications, and usually the heat conduction components of heat exchangers are made of copper alloys. Compared with copper alloy, the thermal conductivity is 6 times that of copper. Therefore, diamond has excellent thermal conductivity as a material for heat exchanger components. However, diamond is hard and brittle, and it is difficult to shape it, so it is extremely difficult to prepare diamond heat exchangers. [0003] At present, the diamond-like carbon film (DLC) deposited by PVD technology has high hardness and high thermal conductivity, and is widely used in some wear-reducing materials such as auto parts. It is also an ideal material for heat exchange components, but PVD technology can only prepare diamon...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/02C23C14/54C25F3/02F28F21/08
CPCC23C14/0605C23C14/021C23C14/028C23C14/54C25F3/02F28F21/081C23C14/0005C23C14/5873F28F21/02
Inventor 陈汪林李喆黄勇浩王成勇伍达尧
Owner GUANGDONG UNIV OF TECH
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