A Novel Anti-Magnetic Levitation Voltage Induction Micro-Driver and Its Control Method

Abstract

The invention discloses a novel anti-magnetic levitation voltage induction type micro-driver, comprising: a permanent magnet array, a driving system and a levitation platform arranged in sequence from bottom to top, the permanent magnet array is composed of N pieces of cuboid magnets, N is an even number, naturally The drive system includes two-phase alternating current, four-phase alternating current, four-phase parallel driving electrodes, two-phase parallel driving electrodes, first induction electrodes, and second induction electrodes. A novel anti-magnetic levitation voltage induction type micro-driver of the present invention solves the problem that the friction force of the micro-driver is greatly affected due to the reduction of the size, and the driver is driven in a silent condition, which improves the performance of the micro-system. Performance and stability; micro-drive programmable control, precise control through digital control, high reliability.

Description

technical field [0001] Patent of the Invention The present invention discloses an anti-magnetic levitation voltage induction type micro driver, which belongs to the field of micro driver. Background technique [0002] Micro-electro-mechanical system (MEMS) is the evolution of microelectronics technology. It is a new type of microdevice based on the combination of micromachining technology and microelectronics technology. It has the advantages of miniaturization, high miniaturization, multiple functions, light weight, small size, capable of mass production, and intelligent processing. With the continuous development of MEMS technology, micro-actuators are playing an increasingly important role in key fields such as aerospace, diving, and biomedicine. [0003] The diamagnetic levitation technology utilizes the diamagnetism of the material to suspend the diamagnetic material passively and stably without inputting external energy. Especially in the past 30 years, with the devel...

AI Technical Summary

Problems solved by technology

[0004] The driving principles of micro-drives can be mainly divided into four types. The first one is used for automatic reclosing, which is based on relay technology drive, phase change technology drive, etc. The automatic closing drive has large volume, high cost and high reliability low and cannot be realized inside the existing switch; the second is to use the micro-step stepper motor to drive the micro-displacement structure, which is similar to the principle of the stepper motor and has high positioning accuracy, but its structure is complex and the cost is high; The three are driven by piezoelectric ceramic micro-displacement structures, but the total driving capacity of this structure is small, which often cannot meet the requirements of the operating space; the fourth is driven by piezoelectric micropumps, electrostatic micropumps, etc., which are mainly driven by Electrostatic, piezoelectric and other methods are used to trigger the movement of mechanical parts to provide a power source for microfluidics. The advantage of this pump is that any fluid can be pushed, but the fluid it drives is pulsed rather than continuous.

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