Preparation method of yttrium oxide spraying powder

A technology of yttrium oxide and powder, which is applied in the field of rare earth oxide powder preparation to achieve good dispersion, less hard agglomeration, and uniform particle size distribution

Inactive Publication Date: 2021-09-03
苏州科陶新材料有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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These problems cannot be solved by traditional preparation methods

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  • Preparation method of yttrium oxide spraying powder
  • Preparation method of yttrium oxide spraying powder
  • Preparation method of yttrium oxide spraying powder

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preparation example Construction

[0022] The present invention is specifically described below in conjunction with the accompanying drawings, a preparation method of yttrium oxide spray powder, which adopts a two-step process to prepare high-quality yttrium oxide powder, comprising the following steps:

[0023] Step 1: Prepare the yttrium oxide powder precursor by using an improved chemical co-precipitation method, and perform thermal decomposition on the precursor to obtain the yttrium oxide powder; the preparation method of the yttrium oxide powder precursor adopts method 1 or method 2 .

[0024] Described method one concrete step is: high-purity Y 2 o 3 Dissolve powder in concentrated nitric acid to obtain yttrium nitrate solution, adjust its concentration to 0.01-1.0M with deionized water, use ammonia water and ammonium oxalate in the form of solution as precipitant and mix uniformly with yttrium nitrate solution for precipitation reaction, and the products are respectively hydroxide Yttrium and yttrium ...

Embodiment 1

[0032] high purity Y 2 o 3 The powder is dissolved in concentrated nitric acid to obtain yttrium nitrate solution. During the dissolution process, continuous heating is required to accelerate its dissolution rate; after the dissolution is completed, the concentration is adjusted to 0.05M with deionized water. Aqueous ammonia solution is used as precipitating agent and yttrium nitrate solution is uniformly mixed for precipitation reaction, and the product is yttrium hydroxide. The obtained precipitate was filtered and cleaned, dried and pulverized into powder, and then heat-treated at a temperature of 800° C. for 12 hours and a heating rate of 0.5° C. / min. Gained yttrium oxide powder was dispersed into deionized water, and sodium hydroxide solution was added simultaneously and the concentration was adjusted at 5×10 -3 M; Wherein sodium hydroxide plays the role of mineralizer and surface modifier. Then carry out hydrothermal treatment, the temperature is 180 ℃, the time is 12...

Embodiment 2

[0034] High purity Y 2 o 3 The powder is dissolved in concentrated nitric acid to obtain a solution of yttrium nitrate. During the dissolution process, continuous heating is required to accelerate its dissolution rate; after the dissolution is completed, its concentration is adjusted to 0.1M with deionized water. Ammonium oxalate was dissolved in deionized water to make a solution, and the concentration of the solution was controlled at 0.5M. The prepared ammonium oxalate solution is used as a precipitating agent and uniformly mixed with the yttrium nitrate solution for precipitation reaction, and the product is yttrium oxalate. The obtained precipitate was filtered and cleaned, dried and pulverized into powder, and then heat-treated at a temperature of 800° C. for 12 hours and a heating rate of 1° C. / min. Gained yttrium oxide powder was dispersed into deionized water, while sodium hydroxide solution was added and the concentration was adjusted at 2×10 -2 M; Wherein sodium ...

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Abstract

The invention discloses a preparation method of yttrium oxide spraying powder. According to the invention,high-quality yttrium oxide powder is prepared by using a high-purity soluble yttrium raw material and a two-step process, wherein in the first step, an improved chemical coprecipitation method is used for preparing an yttrium oxide powder precursor, the precursor is subjected to heat treatment for thermal decomposition to obtain the yttrium oxide powder, and the process aims at controlling the particle size and size distribution of the powder, and in the second step, the obtained yttrium oxide powder is subjected to hydrothermal treatment through a hydrothermal method technology, the morphology of yttrium oxide powder particles is mainly improved, the yttrium oxide powder particles are spherical or approximately spherical, and the granularity agglomeration state of the powder is regulated and controlled by controlling key factors such as a mineralizer, a surface modifier, solid content and the like; and the prepared yttrium oxide powder is good in dispersity and relatively uniform in particle size distribution, and the yttrium oxide powder prepared by adopting the preparation method disclosed by the invention is less in hard agglomeration and good in flowability.

Description

technical field [0001] The invention relates to the technical field of rare earth oxide powder preparation, in particular to a preparation method of yttrium oxide spray powder. Background technique [0002] As the size of silicon wafers and flat-panel displays grows, so does the size of their manufacturing equipment, and therefore the components within them. Plasma treatment is a key link in the semiconductor process. Correspondingly, the plasma energy is also gradually increased in order to prepare silicon wafers with uniform properties on large-scale, large-scale substrates. This requires that high-purity ceramics must be used instead of traditional protection technologies to prolong the service life of the etching machine. Among many ceramic materials, yttrium oxide (Y2O3) coatings have relatively high resistance to plasma erosion, and coatings with a thickness of several hundred microns can be prepared at a low cost. The coating formed by the Y2O3 spray powder current...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/505C04B35/626
CPCC04B35/505C04B35/62605
Inventor 孔令兵
Owner 苏州科陶新材料有限公司
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