Medical DLC film glass and preparation method thereof
A DLC film and glass technology, applied in the field of medical DLC thin film glass and its preparation, can solve the problems of film layer and substrate adhesion, reduce the use range, large stress, etc., to improve hydrophobicity, increase adhesion and application Reliability, improve the effect of blocking water and oxygen
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specific Embodiment 1
[0067] A medical DLC film glass, comprising a glass substrate and a first buffer layer, a second buffer layer, a DLC film layer and a modification layer arranged on the surface of the glass substrate in sequence, wherein:
[0068] The modification layer is an F-doped DLC film layer.
[0069] Further, the glass substrate is a medical vessel made of low borosilicate glass, soda-lime glass or quartz glass. An example is glass vials for vaccines.
[0070] Further, the first buffer layer is SiO x layer, where x = 0.01;
[0071] The second buffer layer is a SiC layer.
[0072] A preparation method of medical DLC film glass, comprising the following steps:
[0073] (1) pretreating the glass substrate;
[0074] (2) Prepare the first buffer layer:
[0075] Preparation of SiO on Pretreated Glass Substrates by Plasma-Enhanced Chemical Vapor Deposition x , to get the glass substrate / SiO x layer, where x = 0.01;
[0076] (3) Prepare the second buffer layer:
[0077] SiO by plasma...
specific Embodiment 2
[0096] A medical DLC film glass, comprising a glass substrate and a first buffer layer, a second buffer layer, a DLC film layer and a modification layer arranged on the surface of the glass substrate in sequence, wherein:
[0097] The modification layer is an F-doped DLC film layer.
[0098] Further, the glass substrate is a medical vessel made of low borosilicate glass, soda-lime glass or quartz glass. An example is glass vials for vaccines.
[0099] Further, the first buffer layer is SiO x layer, where x=2;
[0100] The second buffer layer is a SiC layer.
[0101] A preparation method of medical DLC film glass, comprising the following steps:
[0102] (1) pretreating the glass substrate;
[0103] (2) Prepare the first buffer layer:
[0104] Preparation of SiO on Pretreated Glass Substrates by Plasma-Enhanced Chemical Vapor Deposition x , to get the glass substrate / SiO x layer, where x=2;
[0105] (3) Prepare the second buffer layer:
[0106] SiO by plasma-enhanced ...
specific Embodiment 3
[0125] A medical DLC film glass, comprising a glass substrate and a first buffer layer, a second buffer layer, a DLC film layer and a modification layer arranged on the surface of the glass substrate in sequence, wherein:
[0126] The modification layer is an F-doped DLC film layer.
[0127] Further, the glass substrate is a medical vessel made of low borosilicate glass, soda-lime glass or quartz glass. An example is glass vials for vaccines.
[0128] Further, the first buffer layer is SiO x layer, where x = 0.08;
[0129] The second buffer layer is a SiC layer.
[0130] A preparation method of medical DLC film glass, comprising the following steps:
[0131] (1) pretreating the glass substrate;
[0132] (2) Prepare the first buffer layer:
[0133] Preparation of SiO on Pretreated Glass Substrates by Plasma-Enhanced Chemical Vapor Deposition x , to get the glass substrate / SiO x layer, where x = 0.08;
[0134] (3) Prepare the second buffer layer:
[0135] SiO by plasma...
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