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Metal mask

A metal mask and mask technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problem that the mask is difficult to control the accuracy of the shape and size of the forming part, and achieve easy control and production. , The effect of overcoming deformation and improving product yield

Inactive Publication Date: 2021-10-26
FINEMAT APPLIED MATERIALS +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a metal mask to solve the problem that the mask used in the existing OLED display screen coating process is difficult to control the shape and size of the forming part of the slit opening corresponding to the extremely fine slit pattern. The problem

Method used

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Embodiment Construction

[0052]In the following, the technical means adopted by the present invention to achieve the intended purpose of the invention will be further described in conjunction with the accompanying drawings and preferred embodiments of the present invention.

[0053] The metal mask proposed by the present invention is a common metal mask (CMM) used in the OLED coating process, such as Figure 1 to Figure 4 As shown, various preferred embodiments of the metal mask proposed by the present invention, the metal mask is a sheet-shaped flat object made of a metal material with a low coefficient of thermal expansion (CTE), and the low The metal material with expansion coefficient means that the average expansion coefficient at room temperature is lower than 2.5×10 -6 / ° C metal materials, such as: iron-nickel alloy (Fe-36Ni, Invar) and other materials. The metal mask includes a mask body 10 , a plurality of coating pattern forming structures and a slit pattern structure 20A, 20B.

[0054] ...

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Abstract

The invention discloses a metal mask. A plurality of coating pattern forming structures are formed in a thin mask body with a low thermal expansion coefficient, and a slit pattern structure is formed in a preset area of the mask body. A plurality of opening slits of the slit pattern structure are each provided with a first recess part formed by etching and a slit pattern forming part which communicates with the first recess part and is formed by laser cutting, the oblique angle range of the oblique side walls of the first recess parts is 35-85 degrees, and the depth of the first recess parts is less than or equal to 4 / 5 times of the thickness of the mask body; the depth of the slit pattern forming parts with the vertical peripheral walls is greater than or equal to 1 / 5 of the thickness of the mask body, and through two-stage processing of first etching and second laser cutting and through matching with depth dimension control of the first recess parts and the slit pattern forming parts, control is easy, and a high-resolution opening slit shape is manufactured; and the processing time of a laser beam at the cutting slit pattern forming parts is shortened, the defect of deformation caused by high temperature of laser cutting is effectively overcome, and the product yield of the metal mask is improved.

Description

technical field [0001] The present invention relates to a metal mask, in particular to a common metal mask (common / open mask, CMM) used to form a coating layer in an organic light-emitting diode (Organic Light-Emitting Diode, OLED) coating process , and has a metal mask with a very fine slit pattern structure. Background technique [0002] The under-screen camera technology of smartphones and various display screens has been gradually commercialized, and the goal of full-screen smartphones and various display screens has been realized. Among the under-display camera technologies currently used in the field of organic light-emitting diode (hereinafter referred to as OLED) display manufacturing, coded aperture camera technology or partially transmissive display screens are known important technologies. However, when the OLED display is fully screened, it must take into account the consistency of the appearance of the OLED display when the front camera lens function is activat...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/56
CPCC23C14/042C23C14/24C23C14/12H10K71/166H10K71/00
Inventor 郦唯诚李仲仁赖元章
Owner FINEMAT APPLIED MATERIALS