Transfer method for achieving smooth self-supporting film through external pressure and self-supporting film
A self-supporting film and external pressure technology, applied in ion implantation plating, gaseous chemical plating, coating, etc., can solve the problems of being unable to maintain atomic level flatness, achieve improved flatness, simple operation specifications, and reduce fluctuations Effect
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[0044] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Those who do not indicate the specific conditions in the examples are carried out according to the conventional conditions or the conditions suggested by the manufacturer. The reagents or instruments used were not indicated by the manufacturer, and they were all conventional products that could be purchased from the market.
[0045]The invention provides a flat self-supporting film transfer method realized by external pressure. By applying pressure to the target substrate and the film to be transferred to make them fully and closely contact, the full bonding of the film to be transferred and the target contrast is realized, but in microscopic There is still a certain gap on the surface. Since the two interfaces have a certain degree of wett...
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