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Quartz hemispherical resonator in-situ shape detection ion beam polishing atom manufacturing equipment and method

A technology of hemispherical resonators and ion beams, applied in electron beam welding equipment, manufacturing tools, measuring devices, etc., can solve the problems of large stress removal, small wall thickness of resonators, damage, etc., and achieve high-quality and efficient precision machining and processing The effect of stable environment and reduced scrap rate

Active Publication Date: 2022-05-13
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Quartz hemispherical resonator parts are thin-walled and the material is hard and brittle. Traditional grinding and polishing methods are difficult to meet the processing accuracy requirements of hemispherical resonators. Larger; in the process of abrasive flow polishing, the removal of stress is relatively large, and the wall thickness of the resonator itself is small, which is very easy to cause damage during the polishing process, thereby reducing the precision, surface integrity and consistency of the processed surface; magnetorheological When polishing, the magnetic field is not uniform, and the forming process is difficult to control precisely

Method used

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  • Quartz hemispherical resonator in-situ shape detection ion beam polishing atom manufacturing equipment and method
  • Quartz hemispherical resonator in-situ shape detection ion beam polishing atom manufacturing equipment and method

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Effect test

Embodiment 1

[0036] After the traditional quartz hemispherical resonator is ground and polished, the shape and position accuracy and performance are directly tested, and those that are unqualified are directly scrapped, and the scrap rate is high. The current ultra-precision grinding and polishing of quartz hemispherical resonators is difficult to reduce the coaxiality to 300nm, and the general coaxiality is >1.5μm. In order to solve the problems existing in the existing technology, such as Figure 1-2 As shown, the present invention provides a quartz hemispherical resonator in-situ shape detection ion beam polishing atom manufacturing equipment, including: a numerical control system 1, a micro-scale mobile platform device installed on a machine tool, and a prototype installed on a machine tool base 8 A configuration detection device, a frequency difference detection device, an ion beam processing device, a transmission device 9 , a fixture 5 , a workbench 6 and a vacuum chamber 10 . The ...

Embodiment 2

[0045] On the basis of Embodiment 1, the present invention also provides a method for using the quartz hemispherical resonator to detect ion beam polishing atom manufacturing equipment and process the quartz hemispherical resonator in situ, including the following steps:

[0046] Step 1. After the transmission device 9 transports the quartz hemispherical resonator to be finished to the inside of the machine tool, the micro-scale mobile platform device moves to the clamping station at the transmission device 9, and clamps the quartz hemispherical resonator through the clamp 5;

[0047] Step 2: The clamp 5 clamps the quartz hemispherical resonator and moves to the top of the workbench 6 within the detection range of the in-situ shape detection device, and the in-situ shape detection device starts to work to detect the outline size of the quartz hemispherical resonator, as well as the roundness, The shape and position accuracy such as the coaxiality of the spherical convex center ...

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Abstract

The invention provides a quartz hemispherical resonator in-situ shape detection ion beam polishing atom manufacturing equipment and method, the equipment includes a numerical control system, a micro-scale mobile platform device installed on a machine tool, and an in-situ shape detection installed on a machine tool base device, frequency difference detection device, ion beam processing device, transmission device and worktable, the numerical control system receives the shape accuracy and profile of the quartz hemispherical resonator measured by the in-situ shape detection device and the quartz The frequency difference of the hemispherical resonator is accurately calculated, and the generated instructions are sent back to the micro-scale mobile platform device, which drives the fixture to move, and at the same time controls the ion beam processing device to perform precise machining on the quartz hemispherical resonator. The invention can significantly reduce the reject rate, and can precisely process the quartz hemispherical resonator with high quality and high efficiency.

Description

technical field [0001] The invention relates to the technical field of ultra-precision machining, in particular to a quartz hemispherical resonator in-situ shape detection ion beam polishing atom manufacturing equipment and method. Background technique [0002] Hemispherical resonant gyro is a new type of solid vibration gyro with high precision, high reliability and long life. It is a non-GPS navigation and is not affected by weather and electromagnetic interference. It is an inertial navigation device with excellent performance. It has broad application prospects in aerospace and other strategic weapons. The resonator is the core sensitive part of the hemispherical resonator gyroscope, and its machining accuracy and vibration characteristics directly affect the performance of the hemispherical resonator gyroscope. The quartz resonator has the characteristics of high precision, high reliability and high stability. Among the current gyroscopes, it has the best overall perfo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C21/00B23K15/00G01C19/56G01B11/24G01B11/27G01B11/00G01C25/00
CPCB23K15/06B23K15/00G01C19/56G01B11/2441G01B11/2408G01B11/27G01B11/00G01C25/005
Inventor 张振宇张富旭孟凡宁万省作吴斌顾秦铭刘冬冬
Owner DALIAN UNIV OF TECH
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