Heat treatment quenching method of target material

Abstract

The invention discloses a heat treatment quenching method of a target material. The method comprises the following steps that heat treatment is performed on a metal target material, and then quenching treatment is performed in a quenching medium to obtain a target material; when a heat treatment temperature T1 of the metal target material is more than or equal to 100 DEG C and less than 300 DEG C, the quenching medium is water; when the heat treatment temperature T2 of the metal target material is more than or equal to 300 DEG C and less than or equal to 500 DEG C, the quenching medium is oil; when the heat treatment temperature T3 of the metal target material is more than 500 DEG C and less than or equal to 700 DEG C, the quenching medium comprises air and oil which are forced to flow; and when the heat treatment temperature T4 of the metal target material is more than 700 DEG C and less than or equal to 900 DEG C, the quenching medium comprises air, oil and water which are forced to flow. According to the method, different quenching methods are adopted for the target materials with different heat treatment temperatures, the stress in the target materials is reduced, a grain size is reduced, grain growth in the long-time cooling process is prevented, and the quality of a target material sputtering deposition film is guaranteed.

Description

technical field [0001] The invention belongs to the technical field of metal heat treatment, and in particular relates to a heat treatment quenching method for a target. Background technique [0002] The target is used for sputtering coating. In order to control the uniformity of the coating, there should be no stress concentration or large stress inside the target, because when the stress is released, the movement direction of the particles will be dispersed, and the coating performance will decrease, so the target material will be reduced. Internal stress is particularly important. In addition, during mass production, a large number of targets need to be heat treated. If furnace cooling or air cooling is adopted, a large number of places are required to stack targets. The efficiency is also very low and the production cycle is long. In order to improve efficiency, quenching is performed on the targets after heat treatment. necessary. [0003] The faster the quenching coo...

AI Technical Summary

Problems solved by technology

In addition, during mass production, a large number of targets need to be heat treated. If furnace cooling or air cooling is adopted, a large number of places are required to stack targets. The efficiency is also very low and the production cycle is long. In order to improve efficiency, quenching is performed on the targets after heat treatment. necessary

[0003]The faster the quenching cooling rate after target heat treatment, the more concentrated the stress, and deformation may occur; the slower the quenching rate, the lower the efficiency