Real-time fluorescence monitoring frozen focused ion beam processing device and method
A technology of cryofocusing and real-time fluorescence, which is applied in measuring devices, fluorescence/phosphorescence, and material analysis through optical means. It can solve problems such as low processing efficiency, poor positioning accuracy, and low success rate, and improve processing accuracy. Processing process, the effect of improving processing efficiency and success rate
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Embodiment 1
[0084] see Figure 1 to Figure 4 and Figure 11 , this embodiment provides a cryofocused ion beam processing device for real-time fluorescence monitoring, including a vacuum chamber 1 , an ion beam system 6 and a fluorescence imaging system 2 . Wherein, the vacuum chamber 1 is provided with a cold stage 3, and the cold stage 3 is used to store a frozen sample 8. A fluorescent marker is arranged in the frozen sample 8. When the excitation light is irradiated on the frozen sample 8, the fluorescent marker is excited. capable of emitting fluorescence. The ion beam system 6 is arranged on the vacuum chamber 1 and directed to the frozen sample 8 for emitting a focused ion beam to perform ion beam cutting on the frozen sample 8 . The fluorescence imaging system 2 is set on the vacuum chamber 1 and below the frozen sample 8, and is used for emitting excitation light to the frozen sample 8 and performing real-time optical imaging on the frozen sample 8 at the same time. In specific...
Embodiment 2
[0102] Based on Embodiment 1, compared with Embodiment 1, the real-time fluorescence monitoring cryofocused ion beam processing device provided in this embodiment differs only in the structure of the vacuum chamber hatch 120' and the structure of the cold stage 3 in this embodiment. different form of refrigeration.
[0103] see Figure 5 to Figure 10 , the vacuum chamber hatch 120' in this embodiment is a concave structure, and is provided with a sample transmission window 121'. The cold stage 3 is one end of the cryo-transfer device 7 , which includes a cryo-transfer rod 710 , a sample transfer tube 720 , a bellows assembly 730 , a cryo-transfer three-dimensional translation stage 740 and an angle adjustment device 760 . The sample transmission tube 720 is sealed and connected to the position of the sample transmission window 121 ′ through the bellows assembly 730 . One end of the frozen sample transmission rod 710 is a frozen sample fixing end 713 for fixing the frozen sam...
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