Preparation method of ITO ceramic target material

A ceramic target, wet ball milling technology, applied in ceramic molding machines, manufacturing tools, metal material coating processes, etc., can solve the problems of long production cycle, low production efficiency, etc. The effect of shortening the preparation cycle

Pending Publication Date: 2021-12-03
南宁西桂微电子有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0012] Aiming at the problems of long production cycle and low production efficiency in the existing technology

Method used

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  • Preparation method of ITO ceramic target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Weigh In 2 o 3 : SnO 2 The raw material powder with a mass ratio of 90:10 is mixed with pure water, polyacrylic acid dispersant, and binder by ball milling as required to prepare an ITO slurry with a solid content of 50%;

[0040] Spray granulation of ITO slurry to obtain average particle size D 50 It is 10 μm spherical granulated powder;

[0041] Put the ITO granulation powder into a special mold for molding, the molding pressure is 60 MPa, and the holding time is 5 minutes to obtain an ITO green body with a density of 38%.

[0042] The ITO green body was formed by cold isostatic pressing with a holding pressure of 200 MPa and a holding time of 30 minutes to obtain an ITO green body with a density of 60%.

[0043] Degreasing 10h under the condition of ITO green body temperature 800 °C;

[0044] The degreased ITO biscuit is put into a low-carbon steel ladle, and 304 stainless steel insulation material is added between the sheath and the ITO biscuit, and hot isostat...

Embodiment 2

[0047] Weigh In 2 o 3 : SnO 2 The raw material powder with a mass ratio of 90:10 is mixed with pure water, polyacrylic acid dispersant, and binder by ball milling as required to prepare an ITO slurry with a solid content of 50%;

[0048] Spray granulation of ITO slurry to obtain average particle size D 50 It is 10 μm spherical granulated powder;

[0049] Put the ITO granulation powder into a special mold for molding, the molding pressure is 60 MPa, and the holding time is 5 minutes to obtain an ITO green body with a density of 38%.

[0050] The ITO green body was formed by cold isostatic pressing with a holding pressure of 200 MPa and a holding time of 30 minutes to obtain an ITO green body with a density of 60%.

[0051] Degreasing 10h under the condition of ITO green body temperature 800 ° C;

[0052] The degreased ITO biscuit is put into a low-carbon steel ladle, and 304 stainless steel insulation material is added between the sheath and the ITO biscuit, and hot isosta...

Embodiment 3

[0055] Weigh In 2 o 3 : SnO 2 The raw material powder with a mass ratio of 90:10 is mixed with pure water, polyacrylic acid dispersant, and binder by ball milling as required to prepare an ITO slurry with a solid content of 50%;

[0056] Spray granulation of ITO slurry to obtain average particle size D 50 It is 10 μm spherical granulated powder;

[0057] Put the ITO granulation powder into a special mold for molding, the molding pressure is 60 MPa, and the holding time is 5 minutes to obtain an ITO green body with a density of 38%.

[0058] The ITO green body was formed by cold isostatic pressing with a holding pressure of 200 MPa and a holding time of 30 minutes to obtain an ITO green body with a density of 60%.

[0059] Degreasing 10h under the condition of ITO green body temperature 800 ° C;

[0060] The degreased ITO biscuit is put into a low-carbon steel ladle, and 304 stainless steel insulation material is added between the sheath and the ITO biscuit, and hot isosta...

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Abstract

The invention provides a preparation method of an ITO (indium tin oxide) ceramic target material, which comprises the following steps: performing wet ball-milling mixing on In2O3 powder and SnO2 powder with the purity of 99.99% according to the mass ratio of (90-97): (10-3), and adding a small amount of organic additive in the ball-milling process to obtain ITO slurry with good flowing property; allowing the obtained ITO slurry to be subjected to spray granulation to obtain spherical ITO granulation powder ; carrying out compression molding on the obtained ITO granulation powder to obtain an ITO biscuit with a regular shape; then carrying out cold isostatic pressing secondary pressing on the ITO biscuit; degreasing the ITO biscuit subjected to cold isostatic pressing at low temperature to remove the organic additive; and carrying out hot isostatic pressing sintering on the degreased ITO biscuit to prepare the ITO target material with high density and low resistivity. In the hot isostatic pressing treatment process, low-carbon steel is selected as a sheath, stainless steel is used as an isolation material to prevent the sheath from reacting with the target material, and later stripping is facilitated. According to the method, the sintering temperature and the sintering time required in the ITO target material preparation process are effectively reduced, the problem that the production period of a traditional normal-pressure sintering process is too long is solved, and the method plays a crucial role in improving the production efficiency of the target material.

Description

technical field [0001] The invention relates to the field of preparation of advanced ceramic targets, in particular to a method for preparing an ITO ceramic target. Background technique [0002] ITO film is a heavily doped, highly degenerate n-type semiconductor material, because of its good light-transmitting conductivity (visible light transmittance higher than 95%, resistivity 10 -4 Ω·cm level), excellent wear resistance, corrosion resistance, high thermal stability, good chemical etching, etc., widely used in control panels (TPs), organic light-emitting diodes (OLEDs), solar cells, anti-static glass It is an advanced material with great application prospects. [0003] The performance of ITO thin films is closely related to the comprehensive quality of ITO targets. To obtain ITO thin films with excellent properties, high-quality ITO ceramic targets must first be prepared. [0004] At present, the molding methods of ITO biscuits are mainly divided into two types: (1) we...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/01C04B35/622C04B35/626C04B35/645C23C14/34B28B3/00B28B3/02
CPCC04B35/457C04B35/622C04B35/62695C04B35/6455C23C14/3414B28B3/003B28B3/02C04B2235/3286C04B2235/5445C04B2235/656C04B2235/6567C04B2235/96
Inventor 王永超赵泽良贾时君尤青文
Owner 南宁西桂微电子有限公司
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