Preparation method of amorphous silicon heterojunction solar cell with monocrystalline silicon-like substrate

Abstract

The invention discloses a preparation method of an amorphous silicon heterojunction solar cell with monocrystalline-like silicon as a substrate. The method comprises the following steps: carrying out mechanical damage layer treatment on a monocrystalline-like silicon wafer; depositing a layer of PSG on the surface of the silicon wafer and carrying out heating annealing treatment; carrying out surface cleaning on the processed silicon wafer; performing surface texturing on the treated silicon wafer; carrying out amorphous silicon or microcrystalline layer coating on the processed silicon wafer to form a heterojunction passivation layer; respectively generating transparent conductive film layers on the front and back surfaces of the silicon wafer; and forming grid line electrodes on the transparent conductive film layers on the two faces of the silicon wafer, and completing manufacturing of the heterojunction battery piece. The monocrystalline-like silicon wafer is subjected to PSG deposition and subsequent annealing treatment, the defect density in the silicon wafer body and on the surface of the silicon wafer body is reduced, in-vivo recombination of carriers is reduced, the overall passivation level is improved, meanwhile, the silicon wafer is carried out at the high temperature, grain dislocation in the monocrystalline-like silicon wafer is reformed, lattice defects are reduced, and the conversion efficiency of the monocrystal-like heterojunction solar cell is greatly improved.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a method for preparing an amorphous silicon heterojunction solar cell with a substrate similar to single crystal silicon. Background technique [0002] In recent years, as an inexhaustible clean energy source, solar energy has become more and more popular in various countries. The research and development and production of solar cells are mainly carried out around the direction of cost reduction and efficiency increase. Improving the conversion efficiency of solar cells is the foundation of the development of solar energy business. Reducing the production cost of solar cells is the foundation of expanding the solar energy business and the prerequisite for mass production. condition. [0003] Silicon wafers are the carrier used in the production of silicon-based solar cells, and are generally divided into monocrystalline silicon wafers, quasi-monocrystalline silicon wafers an...

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Problems solved by technology

[0007] In view of the above problems, the present invention provides a method for preparing an amorphous silicon heterojunction solar cell with monocrystalline silicon as a substrate, which solves the problems of low open circuit voltage of solar cells, low conversion efficiency, and uncompetitive products in the prior art. question

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