Preparation method of solvent-resistant high-dielectric-constant insulating layer capable of being simply and conveniently patterned

A high dielectric constant, patterned technology, applied in circuits, electrical components, transistors, etc., can solve problems such as less mention, and achieve the effect of reducing operating voltage, reducing solvent entry, and increasing dielectric constant.

Active Publication Date: 2022-01-18
ZHENGZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current patterning of polymers is mainly focused on the patterning of low dielectric constant polymer films (polyimide), and the patterning of high dielectric constant films is rarely mentioned.

Method used

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  • Preparation method of solvent-resistant high-dielectric-constant insulating layer capable of being simply and conveniently patterned
  • Preparation method of solvent-resistant high-dielectric-constant insulating layer capable of being simply and conveniently patterned
  • Preparation method of solvent-resistant high-dielectric-constant insulating layer capable of being simply and conveniently patterned

Examples

Experimental program
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Effect test

Embodiment 1

[0052] An embodiment of the present invention provides a method for preparing a solvent-resistant high dielectric constant insulating layer material that can be easily patterned, including the following steps:

[0053] (1) Dissolve 2-ethylcyanoacrylate (CEA) (0.07 g) and 1,6-hexanediol diacrylate (HDDA) (0.03 g) at a mass ratio of 7:3 into 1 mL THF solvent In , a solution with a mass fraction of CEA and HDDA of 10 wt% was prepared, and then azobisisobutyronitrile (0.003 g) with a mass sum of CEA and HDDA of 3 wt% (0.003 g) was added to obtain a mixed solution. The mixed solution was degassed by ultrasonic oscillation for 2 min, and then placed in a 40 mw / cm 2 Under 365 nm ultraviolet light for 60 min, the premix was obtained.

[0054] (2) Heat the premix in a water bath at 60 °C for 2 h, then add triallyl isocyanurate, benzoin dimethyl ether, benzophenone, and triethylamine, then dilute with a solvent, and ultrasonically oscillate to obtain a clear solution , the mass fracti...

Embodiment 2

[0057] A method for preparing a solvent-resistant high dielectric constant insulating layer material that can be easily patterned. The difference from Example 1 is that CEA is not added in step (1), and 2-hydroxyethyl acrylate is used instead of CEA Dissolve in tetrahydrofuran solvent.

Embodiment 3

[0059] A method for preparing a solvent-resistant high dielectric constant insulating layer material that can be easily patterned, the difference from Example 1 is that CEA is not added in step (1), and CEA is replaced by perfluoroalkyl ethyl acrylate Dissolve in tetrahydrofuran solvent.

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Abstract

The invention belongs to the field of polymer dielectric materials, and discloses a solvent-resistant high-dielectric-constant insulating layer material capable of being simply and conveniently patterned and a preparation method of the solvent-resistant high-dielectric-constant insulating layer material. By adding polar groups into a polymer, dipole polarization in the material is increased, so the purpose of increasing the dielectric constant of the polymer is achieved; a prepolymer can be cured into a film through a photocuring technology by introducing a group with photoreaction activity, and a fine pattern with a specific shape can be formed by controlling exposure conditions; and the preparation of the anti-solvent polymer is realized at a relatively low temperature. The whole preparation process for preparing the insulating layer polymer is simple and time-saving, high-temperature curing is not needed, and the method can be widely applied to roll-to-roll printing and manufacturing of flexible thin film transistors.

Description

technical field [0001] The invention belongs to the field of polymer dielectric materials, and in particular relates to a solvent-resistant high dielectric constant insulating layer which can be easily patterned and a preparation method thereof. Background technique [0002] In today's society, portable electronic devices and flexible electronic devices are more and more widely used, and various electronic devices based on flexible thin film transistors (TFT) are closely watched in various fields. Flexible electronic devices are bendable and stretchable electronic devices prepared by using various flexible organic materials to replace the rigid parts of electronic devices. However, in the development process of flexible portable electronic devices, various challenges are emerging one after another. [0003] Portable requirements predetermine that the energy supply system of electronic devices cannot be too large, which requires that electronic devices must be able to operat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08J5/18C08L33/14C08F2/48C08F220/34C08F222/14H01L29/51H01L29/786
CPCC08J5/18C08F220/34C08F2/48H01L29/51H01L29/7869C08J2333/14C08F222/102
Inventor 刘旭影孙晴晴王帅陈金周
Owner ZHENGZHOU UNIV
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