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Recovery device for high-boiling residues in chlorosilane raffinate

A chlorosilane raffinate and recovery device technology, applied in halosilane, halide silicon compound, fractionation, etc., can solve the problems of high energy consumption, high operation cost, large equipment investment, etc., achieve small volume, low operation cost, The effect of less investment in equipment

Pending Publication Date: 2022-03-04
青海亚洲硅业半导体有限公司 +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The traditional separation method of high boiling substances in the chlorosilane raffinate is to use a rectification tower for separation, which requires additional rectification towers and supporting facilities, and faces problems such as large equipment investment, high energy consumption, and high operating costs.

Method used

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  • Recovery device for high-boiling residues in chlorosilane raffinate
  • Recovery device for high-boiling residues in chlorosilane raffinate
  • Recovery device for high-boiling residues in chlorosilane raffinate

Examples

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Embodiment 1

[0038] In an exemplary embodiment, a recovery device for high boilers in chlorosilane raffinate is provided, such as figure 1 , 2 As shown, the recovery unit includes:

[0039] An evaporator 1, which is used for evaporating the chlorosilane raffinate containing high boilers;

[0040] A raw material tank 2, the raw material tank 2 is connected to the evaporation kettle 1 to receive the evaporated chlorosilane raffinate;

[0041] A high gravity rotating packed bed 3, the high gravity rotating packed bed 3 includes a steam inlet 38, a raw material liquid inlet 35, a steam outlet 37 and a liquid outlet 36, and the raw material liquid inlet 35 is connected to the raw material tank 2;

[0042] Reboiler 4, described reboiler 4 comprises first reboiler inlet 41, second reboiler inlet 42 and reboiler outlet 43, and described first reboiler inlet 41 is connected with described liquid outlet 36 , the second reboiler inlet 42 is connected to the raw material tank 2, and the reboiler ou...

Embodiment 2

[0052] Based on embodiment 1, a recovery device for high boilers in the chlorosilane raffinate is provided, such as figure 2 As shown, the high-gravity rotating packed bed 3 also includes a high-gravity motor 31, a rotating shaft 32, a packing layer 33 and a liquid distributor 34 arranged on the rotating shaft 32, and the high-gravity motor 31 and the rotating shaft 32 connected, the liquid distributor 34 is used to evenly distribute the liquid in the packing layer 33 .

[0053] Further, the packing layer 33 includes an inner layer and an outer layer that communicate with each other, the inner layer is connected to the raw material liquid inlet 35 , and the outer layer is connected to the steam inlet 38 . The raw material liquid is added into the rotating bed and flows from the inside of the packing layer to the outside of the packing layer, and the steam conducts mass transfer and heat transfer in a countercurrent direction from the outside of the packing layer to the inside...

Embodiment 3

[0059] Based on embodiment 1, a recovery device for high boilers in the chlorosilane raffinate is provided, such as image 3 As shown, the liquid outlet 36 is provided with a liquid collection tank 7, and the liquid collection tank 7 is connected to the first reboiler inlet 41 and the first recovery tank 5 respectively.

[0060] Further, the pipeline connecting the raw material tank 2 and the raw material liquid inlet 35 is provided with a pump 8. Specifically, the pump 8 uses power to smoothly transport the liquid in the raw material tank 2 to the high-gravity rotating packed bed 3 .

[0061] Further, a heat exchanger 9 is provided on the pipeline connecting the second recovery tank 6 and the steam outlet 37 . Specifically, the heat exchanger 9 selects a condenser to cool the steam and collect it in the second recovery tank 6 .

[0062] Further, the working temperature of the evaporator 1 is 150°C-200°C.

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Abstract

The invention discloses a device for recovering high-boiling residues in chlorosilane raffinate, which belongs to the technical field of polycrystalline silicon production and comprises an evaporation kettle (1), a raw material tank (2), a supergravity rotating packed bed (3), a reboiler (4), a first recovery tank (5) and a second recovery tank (6). According to the method, firstly, chlorosilane in the residual liquid is separated from solid residues, then chlorosilane containing high-boiling-point substances is introduced into the supergravity rotating packed bed (3) to be separated, low-boiling-point substances return to a system, a high-boiling-point substance product is obtained, the purpose of recovering the high-boiling-point substances is achieved, the supergravity technology is utilized, the gas-liquid mass transfer efficiency is improved and is more than ten times that of a traditional tower, and the recovery rate of the high-boiling-point substances is increased. Meanwhile, the device can efficiently separate high-boiling-point substances in the residual liquid, the equipment size is reduced, the equipment investment is low, the operation cost is low, and the device is suitable for industrialization.

Description

technical field [0001] The invention relates to the technical field of polysilicon production, in particular to a recovery device for high boilers in chlorosilane raffinate. Background technique [0002] With the rapid development of electronic information and solar photovoltaic industries, the market demand for polysilicon is increasing, and the quality requirements for polysilicon are also getting higher and higher. The mainstream production process of polysilicon is the improved Siemens method, which generates trichlorosilane by reacting metallurgical grade silicon powder, hydrogen and silicon tetrachloride, then purifies trichlorosilane, and finally combines trichlorosilane with Hydrogen undergoes a reduction reaction to obtain high-purity polysilicon. [0003] Some side reactions inevitably occur in the production process of polysilicon to produce part of the raffinate. It is hexachlorodisilane, and the treatment method for this part of the raffinate is generally exte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D3/30B01D3/32B01D1/00C01B33/107
CPCB01D3/30B01D3/322B01D1/0082C01B33/107
Inventor 曹玲玲杨明财任长春柴玉荣鲍守珍宗冰
Owner 青海亚洲硅业半导体有限公司
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