Automatic alignment parallel seal welding method for microelectronic packaging in high vacuum state
A technology of microelectronic packaging and parallel sealing and welding, which is used in microstructure devices, manufacturing microstructure devices, decorative arts, etc., to achieve the effects of improving weld quality, saving investment costs, and accurate and automatic alignment.
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[0025] The present invention will be described in detail below with reference to the accompanying drawings:
[0026] A high vacuum state microelectronics automatically parallel sealing mechanism, including high vacuum sealed welding chambers, in high vacuum closed welding chambers 330, front of the gantry 330 in the welding mechanism On the side, horizontally disposable with aligned grab cover transverse guide rail 331, and the actuator mounting slider 332 is disposed on the alignment cap plate lateral guide rail 331, and connected to the grab mechanism mounting slider 332. There is a grabbing nut connecting block 333, and the grab connection block 333 is screwed together by grabing the bit nut 334 and the grab horizontal pair of grabs 335, and the horizontal pair screw 335 is passed. The 90-degree commutator 336 is connected together with the reversing vertical screw, and the other end of the vertical screw is connected to the sealing magnetic fluid and the sealing cavity to be c...
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