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Treatment method of germanium thinning process processing wastewater

A technology for process processing and treatment methods, which is applied in the fields of water/sewage multi-stage treatment, water/sludge/sewage treatment, chemical instruments and methods, etc. The effect of reducing waste

Active Publication Date: 2022-04-12
广东先导微电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the equipment load of simple physical centrifugation and ceramic membrane filtration is relatively high, and the treatment effect is not good

Method used

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  • Treatment method of germanium thinning process processing wastewater

Examples

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Comparison scheme
Effect test

Embodiment 1

[0025] The treatment method of a kind of germanium thinning process processing waste water of the present embodiment, its process flow chart is as follows figure 1 As shown, it specifically includes the following processing steps:

[0026] (1) The germanium thinning process processing waste water flows into the sedimentation tank, and 4 mg / L polyferric sulfate is added in the sedimentation tank for coagulation and precipitation treatment;

[0027] (2) Step (1) The wastewater flowing out of the sedimentation tank flows into the reaction tank, and a mixed solution of sodium hydroxide and hydrogen peroxide with a mass ratio of 1:2.5 is added to the reaction tank for treatment; the sludge in the sedimentation tank enters the sludge treatment tank , feed 150mg / L ozone and 0.2wt.% sodium hydroxide solution into the sludge treatment tank for processing;

[0028] (3) The effluent treated in the reaction tank in step (2) passes through the security filter and then enters the water col...

Embodiment 2

[0031] The treatment method of a kind of germanium thinning process processing waste water of the present embodiment, its process flow chart is as follows figure 1 As shown, it specifically includes the following processing steps:

[0032] (1) The germanium thinning process processing waste water flows into the sedimentation tank, and 2 mg / L polyferric chloride is added in the sedimentation tank for coagulation and sedimentation treatment;

[0033] (2) Step (1) The wastewater flowing out of the sedimentation tank flows into the reaction tank, and a mixed solution of potassium hydroxide and hydrogen peroxide with a mass ratio of 1:2 is added to the reaction tank for treatment; the sludge in the sedimentation tank enters the sludge treatment tank , feed 100mg / L ozone and 0.1wt.% potassium hydroxide solution into the sludge treatment tank for processing;

[0034] (3) The effluent treated in the reaction tank in step (2) passes through the security filter and then enters the wate...

Embodiment 3

[0037] The treatment method of a kind of germanium thinning process processing waste water of the present embodiment, its process flow chart is as follows figure 1 As shown, it specifically includes the following processing steps:

[0038] (1) The germanium thinning process processing waste water flows into the sedimentation tank, and 6 mg / L polyphosphorus ferric chloride is added in the sedimentation tank for coagulation and precipitation treatment;

[0039] (2) Step (1) The wastewater flowing out of the sedimentation tank flows into the reaction tank, and a mixed solution of calcium hydroxide and hydrogen peroxide with a mass ratio of 1:3 is added to the reaction tank for treatment; the sludge in the sedimentation tank enters the sludge treatment tank , feed 230mg / L ozone and 0.3wt.% calcium hydroxide solution into the sludge treatment tank for processing;

[0040] (3) The effluent treated in the reaction tank in step (2) passes through the security filter and then enters t...

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Abstract

The invention belongs to the technical field of industrial processing wastewater treatment, and discloses a method for treating germanium thinning process processing wastewater. Comprising the following treatment steps: the germanium thinning process processing wastewater flows into a sedimentation tank, an inorganic polymer coagulant is added for coagulating sedimentation treatment, the treated wastewater flows into a reaction box, and a mixed solution of an alkaline substance and hydrogen peroxide is added for treatment; excess sludge enters a sludge treatment tank, and ozone and an alkaline solution are introduced for treatment; effluent treated in the reaction tank and a solution flowing out of the sludge treatment tank are filtered, then enter a water collecting tank to be converged, and then enter an RO membrane treatment system through a high-pressure pump; purified water treated by the RO membrane treatment system is supplied to a germanium thinning process for processing, and treated concentrated water is recycled as germanium-containing concentrated water. The treatment method disclosed by the invention is beneficial to recycling germanium, and the treated purified water can be used for thinning the germanium wafer. And the loss of metal germanium is reduced, and meanwhile, the waste of water resources is reduced.

Description

technical field [0001] The invention belongs to the technical field of industrial processing wastewater treatment, and in particular relates to a treatment method for processing wastewater in a germanium thinning process. Background technique [0002] During the process of processing germanium ingots into wafers, a part of germanium will enter the processing waste liquid through the processes of polycrystalline cleaning, internal circular saw cutting, rounding, multi-wire cutting, chamfering, grinding, thinning, polishing and cleaning. Due to the complexity of the germanium chip processing process, the composition of the wastewater produced by each process is quite different, and it is difficult to concentrate on treatment. In the thinning process, the loss of each piece of germanium is about 60-100μm, and the water used for each piece of germanium thinning process is 0.1-0.15m 3 Therefore, a large amount of waste water containing low content and small particles of germaniu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C02F9/04C02F101/20
CPCY02P10/20
Inventor 何金龙宋向荣余敬桂周铁军
Owner 广东先导微电子科技有限公司
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