Pipeline inner wall poly-p-xylylene coating equipment and coating method

Abstract

The invention relates to equipment and method for coating parylene on the inner wall of a pipeline, and the equipment comprises a to-be-coated pipeline workpiece serving as a deposition chamber, an evaporation furnace, a cracking furnace, a process valve and a first pipeline butt-joint mechanism which are sequentially communicated. The two ends of a coated pipeline workpiece are in sealed connection with the first pipeline butt-joint mechanism and the second pipeline butt-joint mechanism respectively, the second pipeline butt-joint mechanism, the preceding-stage valve, the low-temperature cold trap and the vacuum pump are sequentially communicated, a pipeline cooling cover is arranged outside the coated pipeline workpiece, and the vacuum pump is further communicated with the second pipeline butt-joint mechanism through an auxiliary pumping valve. And a deflation valve is arranged on the second pipeline butt joint mechanism. The pipeline workpiece to be coated is used as a deposition chamber part of the equipment to replace the deposition chamber of the original equipment, so that the production requirement of coating the inner wall of the pipeline is met, the construction problem of large coating equipment is solved, the material utilization rate is increased, and the production cost is reduced. And the process link of cleaning the inner wall of the deposition chamber after conventional coating is completely removed, so that the cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and in particular relates to a parylene coating equipment and a coating method for the inner wall of a pipeline, and is especially suitable for the parylene coating on the inner wall of a long pipeline. Background technique [0002] Parylene is a protective polymer material, and the parylene film layer is prepared by vacuum vapor deposition. The parylene material coating has good thermal performance and chemical stability, and can resist acid, alkali, salt spray, mold and various corrosive gas parts, and is widely used in aerospace, electronics industry, marine environment, etc. surface protection applications. The film layer of parylene material is known as the best three-proof material, which has broad market prospects and economic benefits. [0003] Conventional parylene vacuum coating equipment consists of 5 parts: evaporation chamber, cracking chamber, deposition chamber, cryogenic ...

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Problems solved by technology

[0004] Since the workpiece to be coated in the conventional method needs to be placed in the deposition chamber to complete the coating, limited by the volume of the deposition chamber, for long pipes, especially long metal pipes with corrosion resistance requirements on the inner wall, it is necessary to build an expensive super-large deposition At the same time, this kind of huge equipment is not convenient for long-pipeline products to be produced near the construction site; secondly, during the parylene coating process, all exposed surfaces in the deposition chamber include the effective inner surface of the product to be coated. , the outer surface of the pipeline, the inner wall of the deposition chamber, the application tooling, etc. will form a thin film, which greatly reduces the utilization rate of the material; finally, the parts that do not need to be coated, including the inner wall of the deposition chamber, the application tooling, etc., require a lot of manual cleaning

To sum up, conventional coating equipment needs long pipeline coating, which not only requires the construction of expensive large-scale equipment, but also is not conducive to mass production and lower production costs. As a result, parylene, a high-quality protective film layer, is used for internal protection of pipelines. cannot be widely used

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