Method for manufacturing LED chip without etching and LED chip
An LED chip and etching technology, applied in the direction of semiconductor/solid-state device testing/measurement, semiconductor devices, electrical components, etc., can solve the problems of large LED light-emitting loss, complex etching process, and epitaxial layer etching damage, and achieve a simple measurement method. , The positioning method is accurate and efficient, and the effect of preventing damage
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Embodiment 1
[0027] Such as figure 2 As shown, the method for making LED chips without etching in Embodiment 1 of the present invention includes the following steps:
[0028] S1. An epitaxial layer structure in which an N-type semiconductor layer 2, a light-emitting layer 3, and a P-type semiconductor layer 4 are sequentially grown on the front surface of the substrate 1;
[0029] Wherein, the material of the substrate 1 is selected from any one of sapphire, silicon carbide, silicon, gallium nitride, ZnO, aluminum nitride and spinel; the epitaxial layer adopts metal organic chemical vapor deposition method (MOCVD method), molecular Beam epitaxy method (MBE method) or hydride vapor phase epitaxy method (HVPE method) for stacking; Base compound vapor and non-metallic hydride gas react at high temperature through pyrolysis to generate III-V group compounds, and grow N-type semiconductor layer 2, light-emitting layer 3, and P-type semiconductor layer on the front surface of substrate 1 by de...
Embodiment 2
[0036] Embodiment 2 of the present invention The method for making LED chips without etching comprises the following steps:
[0037] S1. An epitaxial layer structure in which an N-type semiconductor layer 2, a light-emitting layer 3, and a P-type semiconductor layer 4 are sequentially grown on the front surface of the substrate 1; wherein, the material of the substrate 1 is aluminum nitride, and the epitaxial layer adopts an organic metal chemical vapor phase Deposition method (MOCVD method) for lamination;
[0038] S2, making a P electrode 5 above the P-type semiconductor layer 4; the P electrode 5 is made by evaporation;
[0039] S3. According to the epitaxial layer structure grown in the step S1, the thickness of the N-type semiconductor layer 2 is determined to be 4.5um, the thickness from the bottom of the N-type semiconductor layer 2 to the top of the P-type semiconductor layer 4 is 5.3um, and the light-emitting layer 3 and The total thickness of the P-type semiconducto...
Embodiment 3
[0043] An LED chip is manufactured by adopting the method for manufacturing an LED chip without etching in Embodiment 2 of the present invention.
[0044] The above-mentioned embodiments of the present invention also include other process optimization steps during production, such as cleaning steps, detection steps, wire bonding steps, and scribing steps, etc., but these steps belong to the common knowledge in the field of LED chip production. In addition, this article The manufacturing methods that have not been specifically developed in the above also belong to the common knowledge and conventional technical means in the field of LED chip production, so this article will not give a detailed description.
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