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Method for manufacturing LED chip without etching and LED chip

An LED chip and etching technology, applied in the direction of semiconductor/solid-state device testing/measurement, semiconductor devices, electrical components, etc., can solve the problems of large LED light-emitting loss, complex etching process, and epitaxial layer etching damage, and achieve a simple measurement method. , The positioning method is accurate and efficient, and the effect of preventing damage

Pending Publication Date: 2022-05-06
安徽格恩半导体有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Under the existing technical conditions, the electrodes of conventional front-mounted and flip-chip LEDs are etched from the P-type semiconductor layer to the N-type semiconductor layer, and then metal-plated to make N-type electrodes, such as figure 1 For the production of formal LEDs, the production of N-type electrodes requires first etching the epitaxial layer structure from the P-type semiconductor layer to the N-type semiconductor layer, and removing the edge of the above stacked structure until the edge of the N-type semiconductor layer is exposed. On the one hand, the etching process is relatively complicated and time-consuming; on the other hand, the epitaxial layer is damaged by etching, which causes a large loss of LED light emission.

Method used

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  • Method for manufacturing LED chip without etching and LED chip
  • Method for manufacturing LED chip without etching and LED chip
  • Method for manufacturing LED chip without etching and LED chip

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Effect test

Embodiment 1

[0027] Such as figure 2 As shown, the method for making LED chips without etching in Embodiment 1 of the present invention includes the following steps:

[0028] S1. An epitaxial layer structure in which an N-type semiconductor layer 2, a light-emitting layer 3, and a P-type semiconductor layer 4 are sequentially grown on the front surface of the substrate 1;

[0029] Wherein, the material of the substrate 1 is selected from any one of sapphire, silicon carbide, silicon, gallium nitride, ZnO, aluminum nitride and spinel; the epitaxial layer adopts metal organic chemical vapor deposition method (MOCVD method), molecular Beam epitaxy method (MBE method) or hydride vapor phase epitaxy method (HVPE method) for stacking; Base compound vapor and non-metallic hydride gas react at high temperature through pyrolysis to generate III-V group compounds, and grow N-type semiconductor layer 2, light-emitting layer 3, and P-type semiconductor layer on the front surface of substrate 1 by de...

Embodiment 2

[0036] Embodiment 2 of the present invention The method for making LED chips without etching comprises the following steps:

[0037] S1. An epitaxial layer structure in which an N-type semiconductor layer 2, a light-emitting layer 3, and a P-type semiconductor layer 4 are sequentially grown on the front surface of the substrate 1; wherein, the material of the substrate 1 is aluminum nitride, and the epitaxial layer adopts an organic metal chemical vapor phase Deposition method (MOCVD method) for lamination;

[0038] S2, making a P electrode 5 above the P-type semiconductor layer 4; the P electrode 5 is made by evaporation;

[0039] S3. According to the epitaxial layer structure grown in the step S1, the thickness of the N-type semiconductor layer 2 is determined to be 4.5um, the thickness from the bottom of the N-type semiconductor layer 2 to the top of the P-type semiconductor layer 4 is 5.3um, and the light-emitting layer 3 and The total thickness of the P-type semiconducto...

Embodiment 3

[0043] An LED chip is manufactured by adopting the method for manufacturing an LED chip without etching in Embodiment 2 of the present invention.

[0044] The above-mentioned embodiments of the present invention also include other process optimization steps during production, such as cleaning steps, detection steps, wire bonding steps, and scribing steps, etc., but these steps belong to the common knowledge in the field of LED chip production. In addition, this article The manufacturing methods that have not been specifically developed in the above also belong to the common knowledge and conventional technical means in the field of LED chip production, so this article will not give a detailed description.

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Abstract

The invention relates to the technical field of LED manufacturing, in particular to an etching-free LED chip manufacturing method and an LED chip, innovatively provides a positioning means of an N-type semiconductor layer, an N electrode is manufactured on the side face of a positioning position, the etching process step in the conventional LED chip manufacturing process is omitted, the operation process is simplified, the working efficiency is improved, and the manufacturing cost is reduced. The method comprises the following operation steps: S1, sequentially growing epitaxial layer structures of an N-type semiconductor layer, a light-emitting layer and a P-type semiconductor layer on the front surface of a substrate; s2, manufacturing a P electrode above the P-type semiconductor layer; s3, determining the thickness of the N-type semiconductor layer as X, the thickness from the bottom of the N-type semiconductor layer to the top of the P-type semiconductor layer as Y and the total thickness of the light-emitting layer and the P-type semiconductor layer as Z according to the epitaxial layer structure grown in the step S1, and setting the position of the N electrode in a range of Y-Z-Y from the top of the P-type semiconductor layer; and S4, manufacturing the N electrode on the side surface in the position range of the N electrode determined in the step S3.

Description

technical field [0001] The invention relates to the technical field of LED production, in particular to a method for producing an LED chip without etching and the LED chip. Background technique [0002] Under the existing technical conditions, the electrodes of conventional front-mounted and flip-chip LEDs are etched from the P-type semiconductor layer to the N-type semiconductor layer, and then metal-plated to make N-type electrodes, such as figure 1 For the production of formal LEDs, the production of N-type electrodes requires first etching the epitaxial layer structure from the P-type semiconductor layer to the N-type semiconductor layer, and removing the edge of the above stacked structure until the edge of the N-type semiconductor layer is exposed. On the one hand, the etching process is relatively complicated and time-consuming. On the other hand, the epitaxial layer is damaged by etching, which causes a large loss of LED light. Contents of the invention [0003] I...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L33/00H01L33/36H01L21/66
CPCH01L33/0062H01L33/36H01L22/12H01L22/20H01L2933/0016
Inventor 阚钦
Owner 安徽格恩半导体有限公司