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Method and device for reducing attenuation of perc battery piece

A cell and silicon substrate technology, applied in circuits, electrical components, photovoltaic power generation, etc., to avoid low yield and high efficiency

Active Publication Date: 2022-07-05
一道新能源科技(衢州)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Factors causing the attenuation are still being studied, and besides the conventional B-O pair causes, there are still unknown factors that are still being studied, possibly related to higher metal impurity content in polysilicon

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] A method for reducing the attenuation of a perc cell, comprising the steps of:

[0042] (1) The silicon substrate with the aluminum oxide film deposited on the back is placed under the ionization outlet of the discharge plasma reactor, and the silicon substrate is placed in a sealed cavity. increasing the first surface temperature;

[0043] (2) Pour methane and silane into the plasma reactor, and control the temperature of the silicon substrate surface to the second surface temperature within the time t1 under the power of 2500w-3500w, and the gas introduction rate of the methane and silane v= Q*h / t1*D; where Q is the heating power, and h is the correlation coefficient; the t1 is less than or equal to 20s, and D is the diameter of the outlet;

[0044] (3) When the pressure in the chamber reaches 0.1mbar, stop feeding methane and silane gas, adjust the power to 1000w-2000w, and vacuumize after the reaction time is 3-5min;

[0045] (4) Pour ammonia gas into the plasma r...

Embodiment 2

[0062] The invention provides a device for reducing the attenuation of perc cell sheets, comprising a cavity, a plasma reactor, a gas supply unit and a controller;

[0063] The plasma reactor outlet is communicated with the cavity;

[0064] the gas supply unit communicates with the inlet of the plasma reactor;

[0065] The cavity is also provided with a flow-controllable return port, and the return port is communicated with the inlet pipeline of the plasma reactor;

[0066] The cavity is provided with a temperature sensor, a gas concentration sensor, and a silicon substrate opposite to the reactor outlet;

[0067] The controller is electrically connected with the plasma reactor, the gas supply unit and the temperature sensor to control the power of the reactor, the gas inflow and the flow rate of the return port of the gas supply unit according to the temperature value and the gas content.

[0068] The device of the invention can automatically control the reactor, the gas su...

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PUM

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Abstract

The invention relates to a method and device for reducing attenuation of a perc battery piece, and the method comprises the following steps: placing a silicon substrate below an ionization outlet of a discharge plasma reactor, placing the silicon substrate in a sealed cavity, and raising the surface temperature of the silicon substrate by a first surface temperature under the power of 1000w-2000w through plasma plume; methane and silane are introduced into the plasma reactor, the surface of the silicon substrate is heated to the second surface temperature within the time t1 under the power of 2500-3500 w, and the gas introduction rate v of the methane and the silane is equal to Q * h / t1; when the pressure in the cavity reaches 0.1 mbar, stopping introducing the methane and the silane gas, adjusting the power to 1000 w-2000 w, reacting for 3-5 minutes, and vacuumizing; and introducing ammonia gas into the plasma reactor, controlling the pressure of the cavity to reach 0.1 mbar again within 5 seconds, stopping introducing the ammonia gas, reacting for 3-5 minutes under the power of 1000-2000 w, recovering the normal pressure, and taking out the silicon substrate. According to the invention, the coating process of the silicon substrate is optimized, so that an attenuation-resistant perc battery piece structure is formed, the overall yield is good, and the effect is improved.

Description

technical field [0001] The invention relates to the technical field of perc batteries, in particular to a method and device for reducing the attenuation of perc battery sheets. Background technique [0002] Although perc cells have higher conversion efficiency, perc cells have higher attenuation than other crystalline silicon cells, and for this reason, processes and equipment for inhibiting attenuation of single polycrystalline perc cells have been successively introduced. It is believed that the attenuation can be suppressed by using low temperature slurry, gettering, high temperature annealing and laser rapid annealing. The factors leading to the attenuation are still under investigation, and besides the conventional B-O pair causes, there are unknown factors still under investigation, which may be related to the higher metal impurity content in polysilicon. [0003] The present invention will adopt a new method and device to prepare a perc battery with better anti-fadin...

Claims

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Application Information

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IPC IPC(8): H01L31/18H01L31/0216
CPCH01L31/1804H01L31/1864H01L31/02167Y02P70/50
Inventor 刘涛章康平王建明舒华富朴松源刘勇
Owner 一道新能源科技(衢州)有限公司
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