Method for producing miniature solid immersion lens

Abstract

The manufacture of miniature solid immersion lens includes the following steps: making adhering suspension device with one rod-like or conic end by using material with softening point higher than that of the material to be processed and no intermiscibility of the material; producing material silk of homogeneous thickness and cutting the silk into short sections; smelting to make spherical lens via roasting the sections to near softening point inside a heating furnace, adhering the softened section to the end of the suspension device, heating the section in the suspension device in the heating furnace for the second time to soften and become ball, cooling and taking down the ball; and measurement, polishing the smelted spherical lens and optical cutting to obtain semi-spherical immersion lens. The said technological process is simple, fast, low in cost and high in product quality.

Description

1. Technical field [0001] The invention relates to a method for manufacturing a miniature solid immersion lens, in particular to a method for manufacturing a miniature solid immersion lens by using a thermal melting method. 2. Background technology [0002] Solid Immersion Lens (Solid Immersion Lens), that is, hemispherical or hyper-hemispherical lens, is a basic optical element and has key applications in many optical systems. Especially in high-density optical storage technology and optical microscopy technology, solid immersion lens is the key device used to obtain high resolution. However, the fabrication of solid immersion lenses is difficult. For a solid immersion lens with a larger diameter (greater than 1 mm), it can be obtained by using the existing conventional optical processing methods to first produce a ball lens of the required size, and then remove the hemisphere or reduce the hemisphere. Among them, the processing of ball lenses is very difficult. Whether i...

AI Technical Summary

Problems solved by technology

Among them, the processing of ball lenses is very difficult. Whether it is manual or mechanical processing, it requires high processing technology and workers' operational skills and proficiency, and it is not easy to guarantee the surface shape, local aperture and surface finish of the spherical surface during processing. With the reduction of the processing size, the difficulty of processing increases rapidly, so that it is impossible to process ball lenses with a diameter of less than 1mm.

At the same time, the consumption of materials in the conventional optical cold processing process is relatively large. First of all, it is necessary to process the corresponding size of the abrasive tool before making the ball lens, and there are relatively high requirements for the processing accuracy of the abrasive tool.

Secondly, bulk materials (glass, plastic) can be processed only after being roughly ground into an approximately spherical shape, and the utilization rate of optical materials in this process is low

Third, due to the difficulty of processing, the final yield is low

Due to the characteristics of the semiconductor wet etching process, this method first has the inherent disadvantages of complex manufacturing process, requiring more than a dozen processes, requiring a lot of equipment, consuming precious metals and single crystal semiconductor materials, long cycle time and high cost.

Secondly, the controllability of the process of making a concave spherical surface by directional etching on semiconductor materials is poor. To etch a spherical surface, the etching atmosphere and the etching time must be strictly matched.

Changes in ambient temperature and etchant concentration will have a greater impact on the etching rate, resulting in deterioration of the etched concave spherical surface

Third, the inherent disadvantages of undercutting and other wet etching make the surface finish of the template made by this etching method poor

Fourth, because Si molds will oxidize and burst at higher temperatures (above 300°C), this kind of mold can only be used to press optical plastics with low softening points, and cannot make glass materials (softening points are generally higher than 500°C). hemispherical lens

Therefore, the equipment is huge, the production cost is high, and the diameters of the ball lenses are different, so strict sorting is required.