Process for preparing nanometer metallic particles dispersion oxide optical thin film
A technology of nano-metal particles and metal particles, which is applied in optics, optical components, metal material coating technology, etc., can solve the problems of difficult to control the concentration of metal particles, it is difficult to improve and control the composition of metal dispersed particles, and achieve excellent nonlinear The effect of the characteristic
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[0011] Au / SiO of the present invention 2 The nanometer metal particle dispersed oxide multilayer film of the system is composed of several or even hundreds of layers of nanometer metal particle layers and oxides. The diameter of the nanometer metal particles is 2 to 50 nm, and the thickness of the oxide layer is several nanometers to tens of nanometers. figure 2 Represents the nanolayered morphology of 11-layer films (nano-Au layer and SiO 2 Layers are 11 layers) cross-sectional transmission electron micrographs. Such as figure 2 As shown in a, the nano-metal particle layer is completely parallel and evenly spaced in a large area, and the thickness of the entire film is 150nm. From figure 2 b We can observe that Au and SiO 2 nanolayer structure, where SiO 2 The thickness of the layer is 10 nm and the diameter of the gold particles is 6-8 nm. The thin film is prepared by ion sputtering technology.
[0012] Its specific technological process is:
[0013] 1. Au and SiO...
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