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Method of bulk processing micro probe based on three dimensional micro processing technology

A technology of micro-processing and batch processing, which is applied in the direction of hypodermic injection devices, etc., can solve the problems of long processing time and less processed materials, and achieve the effect of low processing cost and long mold life

Inactive Publication Date: 2004-12-22
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

Although this method can realize the mass production of micro-probes, because the PDMS material is very soft, only the casting method can be used to replicate micro-needles, so the processing time required for replicating micro-needles with it is shorter than that of metal molds The molding process is longer, and the materials suitable for PDMS molds are less than metal molds

Method used

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  • Method of bulk processing micro probe based on three dimensional micro processing technology

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Embodiment Construction

[0023] Such as figure 1 Shown, embodiment is provided below in conjunction with the specific content of the inventive method:

[0024] First deposit 2 microns of titanium metal as a seed layer on the silicon substrate, and then carry out oxidation treatment. The specific oxidation process is: dissolve 15 grams of NaOH in 750ml of DI water. In order to improve the oxidation rate and oxidation uniformity, oxidize at 65 ℃ in a water bath, when the temperature of the water bath reaches 50°C, add 15ml of hydrogen peroxide, when the temperature of the water bath reaches 65°C, put the substrate into it, finish the oxidation in three minutes, then put it into DI water to clean the substrate.

[0025] Spray 500 microns of SU-8 photoresist on the oxidized and cleaned substrate, and then perform pre-baking. The pre-baking conditions are: bake at 65°C for half an hour, bake at 95°C for 2.5 hours, and then cool with the furnace. The pre-baked substrate is exposed, and the exposure conditi...

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Abstract

A process based on 3D microprocessing technology for preparing microprobes in batches includes depositing metallic seed layer on substrate, applying photoresist, baking, exposing baking, developing, laser cutting on the top of photoresist to become a slope top structure, electroforming metallic mould of the microstructure, removing photoresist, and copying the polymer microprobes by metallic mould.

Description

technical field [0001] The invention relates to a method for processing microprobes, in particular to a method for batch processing microprobes based on a three-dimensional microfabrication process. It belongs to the technical field of micro processing. Background technique [0002] Conventional hypodermic injections typically require a needle to penetrate the surface of the skin and deep below the skin to deliver the drug directly into a blood vessel. Therefore, this process is not only accompanied by pain, but also requires some training to master the injection technique. The microneedles only pierce the stratum corneum of the skin surface and no longer go deep, and the medicine enters the blood circulation system through capillaries. Since there are no nerve endings in the stratum corneum, there is no significant pain during the injection. The operation process of the microneedle is also very simple, as long as the needle display is directly pasted on the skin, it is e...

Claims

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Application Information

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IPC IPC(8): A61M5/00
Inventor 朱军
Owner SHANGHAI JIAO TONG UNIV
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