Bragg raster hydrogen sensor and its preparing process

A preparation process and sensor technology, applied in the Bragg grating hydrogen sensor and its preparation field, can solve the problems of increased film thickness, easy damage and the like

Inactive Publication Date: 2005-03-02
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The invention improves the axial driving force of the grating by increasing the area of ​​the metal palladium film of the cantilever beam without increasing the thickness of the palladium film, and solves the problem caused by increasing the film thickness of the Bragg grating type hydrogen sensor in order to improve its sensitivity Easy to break and other problems, because the grating is fixed on the cantilever beam, it has a certain ability to resist vibration interference

Method used

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  • Bragg raster hydrogen sensor and its preparing process

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] 1. Use sputtering method to make Cr / Cu primer on single crystal silicon substrate thick;

[0024] 2. Electroplate a 20μm thick Cu film as the support seat of the micro-cantilever beam. The length and width of the support are 4×4mm;

[0025] 3. A metal Pd film with a thickness of 200nm is deposited on the Cu film by magnetron sputtering as a sensitive film for absorbing hydrogen;

[0026] 4. Next, spin-coat a 10 μm thick AZ4620 photoresist on the metal Pd film, photolithography, develop and electroform a 10 μm thick nickel film as a part of the drive beam;

[0027] 5. Remove photoresist;

[0028] 6. Using the Ni film as a mask, etch away the metal Pd with a thickness of 200nm by dry method;

[0029] 7. Wet etch the Cu film under the Pd film as the sacrificial layer. Since the length and width of the beam are 8mm and 2mm respectively, when the Pd film is leaked, a part of Cu remains at the support as the support of the cantilever beam.

[0030] 8. Select the Bragg wa...

Embodiment 2

[0034] 1. Use sputtering method to make Cr / Cu primer on single crystal silicon substrate thick;

[0035] 2. Electroplate a 30μm thick Cu film as the support seat of the micro-cantilever beam. The length and width of the support are 4×4mm;

[0036] 3. A metal Pd film with a thickness of 300nm is deposited on the Cu film by magnetron sputtering as a sensitive film for absorbing hydrogen;

[0037] 4. Next, spin-coat 20 μm thick AZ4620 photoresist on the metal Pd film, photolithography, develop and electroform a 10 μm thick nickel film as part of the drive beam;

[0038] 5. Remove photoresist;

[0039] 6. With a Ni film micro-mask, etch away the metal Pd with a thickness of 300nm by dry method;

[0040] 7. Wet etch the Cu film under the Pd film as the sacrificial layer. Since the length and width of the beam are 8mm and 2mm respectively, when the Pd film is leaked, a part of Cu remains at the support as the support of the cantilever beam.

[0041] 8. Select the Bragg waveleng...

Embodiment 3

[0045] 1. Use sputtering method to make Cr / Cu primer on single crystal silicon substrate thick;

[0046] 2. Electroplate a 40μm thick Cu film as the support seat of the micro-cantilever beam. The length and width of the support are 4×4mm;

[0047] 3. A metal Pd film with a thickness of 500nm is deposited on the Cu film by magnetron sputtering as a sensitive film for absorbing hydrogen;

[0048]4. Next, spin-coat 20 μm thick AZ4620 photoresist on the metal Pd film, photolithography, develop and electroform a 10 μm thick nickel film as part of the drive beam;

[0049] 5. Remove photoresist;

[0050] 6. Using a Ni film micro-mask, etch away the metal Pd with a thickness of 500nm by dry method;

[0051] 7. Wet etch the Cu film under the Pd film as the sacrificial layer. Since the length and width of the beam are 8mm and 2mm respectively, when the Pd film is leaked, a part of Cu remains at the support as the support of the cantilever beam.

[0052] 8. Select the Bragg waveleng...

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Abstract

A Prague raster hydrogen sensor and its manufacture technology are used in automatic control field. In Prague raster hydrogen sensor, structure id formed by palladium film sticking on substrate nickel film, whose one end is fixed on Cu base and another to be cantilever beam, optical fiber probe with Prague raster impending end of cantilever beam and fiber-tail is contact. Its manufacture technology includes: rendering by Cr / Cu on monocrystalline silicon substrate; electroplating Cu film; magnetism control hydrogen sensitive film; coating photoresist; photoetching; electroplating Ni film and clearing photoresist; corrasion palladium with Ni film; corrasion copper film with Ni film; manufacturing Prague raster by choosing Prague wavelength and molecule laser writing method; optical fiber probe with Prague raster on its end is sticking on cantilever beam and another end fiber-tail of optical fiber is contact. The invention has increased axial driving force of raster, solved the problem of easy to be destroyed brought by increasing film thickness for raising sensitiveness.

Description

technical field [0001] The invention relates to a Bragg grating hydrogen sensor and a preparation process thereof, in particular to a Bragg grating hydrogen sensor driven by a micro-opto-electromechanical system micro-cantilever beam and a preparation process thereof, which are used in the technical field of automatic control. Background technique [0002] Existing hydrogen sensors mainly include three types: thin-film resistive, electrochemical, and fiber-optic. Optical fiber sensors can transfer sensitive information to safe areas in the form of optical signals, which can well avoid potential dangers. In addition, optical fiber sensors also have high sensitivity, high precision, strong anti-interference ability, large dynamic response range, High pressure resistance, corrosion resistance and other outstanding advantages. Metal palladium is the most commonly used sensitive material for various optical fiber hydrogen sensors, because palladium can absorb hydrogen in the air...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/31G01N27/407
Inventor 陈吉安曹莹张晓晶邱显涛周业成
Owner SHANGHAI JIAO TONG UNIV
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