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Method for making nano-scaled micro temperature sensor

A temperature sensor and nanoscale technology, applied in the field of sensors, can solve the problems of large temperature sensors, restricting development and application, and poor linearity, and achieve the effects of reducing heat capacity, facilitating mass production, and fast temperature response

Inactive Publication Date: 2005-09-07
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Summary
  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

Due to the shortcomings of traditional temperature sensors such as large size, high power consumption, and poor linearity, it restricts its further development and application.

Method used

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  • Method for making nano-scaled micro temperature sensor
  • Method for making nano-scaled micro temperature sensor

Examples

Experimental program
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Embodiment Construction

[0029] refer to figure 1 figure 2 , the manufacturing steps of the present invention are:

[0030] (1) Adopt the low-pressure chemical vapor deposition process of general-purpose low-pressure chemical vapor deposition equipment or the plasma-enhanced chemical vapor deposition process deposition of plasma-enhanced chemical vapor deposition equipment on the single-crystal silicon wafer 1, the heat of oxidation furnace equipment The growth process thermally grows a silicon dioxide film layer 8 as a sacrificial layer for etching the single crystal silicon wafer 1 . Embodiment A layer of silicon dioxide film 8 is thermally grown by using oxidation furnace equipment.

[0031] (2) Deposit a layer of lower layer silicon nitride film under the monocrystalline silicon wafer 1 by adopting the low-pressure chemical vapor deposition process of common chemical vapor deposition equipment or the plasma enhanced chemical vapor deposition process of plasma enhanced chemical vapor deposition ...

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Abstract

The invention discloses a method of making nanometer scale micro-temperature sensor relating to the field of sensor, which comprises monocrystalline silicon chips, lower and upper silicon nitride films, adhesive coatings, temperature sensing resistances, conductive coatings, cantilever beams and silicon dioxide films. The method produces temperature sensing resistances as temperature measuring sensing unit using the micro-machinery processing art, the resistance value changes with the temperature of the circumstance and can be used to measure the temperature and as the sensor, especially used in the situation of demanding small volume such as microfluid sensor and measuring temperature of device with IC chip, sensor chip inserted.

Description

technical field [0001] The invention relates to a method for manufacturing a nanometer-scale miniature temperature sensor in the field of sensors. The device manufactured by the invention is especially suitable for microfluid sensors and other occasions requiring small volume as precise temperature measurement and embedded in IC chips, sensor chips, etc. Sensor device for sheet temperature measurement. Background technique [0002] Temperature sensors are widely used in personal computers, mobile phones, automobiles, medical equipment, game consoles, microfluidic sensors, and other devices. With the improvement of IC integration and the popularity of portable devices such as notebook computers, mobile terminals, and PDAs, the problem of power consumption and heat dissipation has become more and more prominent. Only by precisely controlling the operating temperature of the chip can the stable operation of the device be guaranteed. Small temperature sensors are also required...

Claims

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Application Information

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IPC IPC(8): B81B7/00B81C1/00G01K7/22
Inventor 杨拥军徐淑静吕树海
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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