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A X-lay assembling lens and producing technology thereof

A technology of combining lenses and X-rays, applied in the fields of lenses, nuclear engineering, radiation/particle processing, etc., can solve the problems of affecting X-ray radiation transmittance, large spherical aberration affecting focusing effect, thin structure height and size, etc. The effect of X-ray radiation transmittance, high machining accuracy, high structure height and aspect ratio

Inactive Publication Date: 2006-08-02
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to solve the problems in the background technology that large spherical aberration affects the focusing effect; the height and dimension of the structure are thin, which affects the transmittance of X-ray radiation; the high roughness increases the scattering, etc., the purpose of the present invention is to provide a Low-degree, integrated and one-time precision processing and molding, parabolic X-ray focusing combination lens that does not require precise assembly and its manufacturing process

Method used

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  • A X-lay assembling lens and producing technology thereof
  • A X-lay assembling lens and producing technology thereof

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Embodiment Construction

[0011] Such as figure 1 As shown, the X-ray focusing combination lens of the present invention includes a support body 1 , a lens body 2 and an air cavity 3 . The support body 1 and the lens main body 2 can be made of organic materials such as trimethacrylate, polyimide, polycarbonate, and epoxy resin. The air cavity 3 is air. The focal length of the lens body 2 is greater than the length of the lens body 2 and can be selected to be 0.5 meters or 1 meter or 2 meters or 3 meters or 5 meters or other sizes.

[0012] Manufacturing process of the present invention is specifically as follows:

[0013] 1. The silicon substrate can be a single crystal silicon wafer with (100) or (110) or (111) crystal plane, and the substrate cleaning steps are as follows:

[0014] 1). Remove oil and other organic matter with toluene, acetone, ethanol, etc.,

[0015] 2). Boil with aqua regia to remove metal ions,

[0016] 3). Ultrasonic cleaning with deionized water, dehydration with absolute et...

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Abstract

The present invention belongs to a X-ray microstructure optical device, in particular, it relates to a X-ray composite lens and its making process. Said invention includes supporting body, lens main body and air cavity, and its making process includes the following steps: firstly, on single crystal silicon wafer surface successively making polyimide film and metal film, photoetching, electroforming, stripping, opening window and making X-ray photomask; then on the titanium wafer surface preparing X-ray photoresist, using prepared mask to make X-ray photoetching operation to form photoresist structure with double-paraboloidal type lens form and gap with air cavity form; finally, electroforming, moulding and making X-ray composite lens.

Description

technical field [0001] The invention belongs to an X-ray microstructure optical device, in particular to an X-ray combined lens and a manufacturing process thereof. Background technique [0002] X-ray combined lens is a new type of X-ray microstructure optical element suitable for high-energy X-ray band (that is, X-ray radiation energy exceeding 5keV) proposed by A. Snigirev in 1996. The X-ray combination lens has many advantages, such as no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. In particular, it is suitable for occasions where the energy of X-ray radiation exceeds 5keV, so the element has broad application prospects in scientific and technical research. In recent years, research on various X-ray diagnostic techniques based on X-ray combined lenses is very active. For example, high-energy X-ray fluorescence micro-tomography experimental system...

Claims

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Application Information

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IPC IPC(8): G02B3/00G21K1/00
Inventor 梁静秋乐孜纯孔庆峰
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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