Self-cleaning colloidal slurry composition and process for finishing a surface of a substrate
a colloidal slurry and composition technology, applied in the direction of polishing compositions with abrasives, electrical equipment, construction, etc., can solve the problems of reducing the life of the disk, affecting the performance of the disk, so as to achieve the effect of enhancing the contamination mitigation mechanism
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example 1
[0084] Two solutions were first made. Solution A was first made by placing 13.6 grams of cerium sulfate tetrahydrate (Ce(SO4)2 4H2O MW 404.31) and 240 grams of sulfamic acid (H3NSO3 MW 97.1) in a beaker and adding 1200 ml of deionized (DI) water and stirring at room temperature (RT) until dissolved. Solution B was made by pouring 1840 ml DI water into 4480 ml of Ludox SM with stirring, and then stirring a mixture of 6.4 grams of Corsheen CorAdd 9195 and 480 ml DI water into that. Both Solution A and Solution B were then put through a 0.1 micron filter to remove any particles that might cause scratching. Solution B was then poured into Solution A over a 5 second period with strong mixing to form the slurry. The final pH of the slurry was 1.2, while its final volume 8 liters.
[0085] The slurry was used to superfinish a 95 mm aluminosilicate glass disk substrate at 1.0 psi-disk for 12 minutes on a conventional double-sided polishing machine. The slurry temperature was 20-35 C.
[0086] A...
example 2
[0088] Two solutions were first made. Solution A was first made by placing 216.4 grams of ferric chloride hexahydrate (FeCl3 6H2O MW 270.3) and 160 grams of sulfamic acid (H3NSO3 MW 97.1) in a beaker and adding 1200 ml of deionized (DI) water and stirring at room 5temperature (RT) until dissolved. Solution B was made by pouring 1840 ml DI water into 4480 ml of Ludox SM with stirring, and then stirring a mixture of 6.4 grams of Corsheen CorAdd 9195 and 480 ml DI water into that. Both Solution A and Solution B were then put through a 0.1 micron filter to remove any particles that might cause scratching. Solution B was then poured into Solution A over a 5 second period with strong mixing to form the slurry. The final pH of the slurry was 1.2, while its final volume 8 liters.
[0089] The slurry was used to superfinish a 95 mm aluminosilicate glass disk substrate 1.0 psi-disk for 12 minutes on a conventional double-sided polishing machine. The slurry temperature was 20-35 C.
[0090] After ...
example 3
[0091] Two solutions were first made. Solution A was first made by placing 1600 ml of DI water in a beaker and adding 140 ml of 50% nitric acid (HNO3) and stirring in 56.4 grams ferric sulfate nonahydrate (Fe2(SO4)3 9H2O MW 562.0) until dissolved. Solution B was made by pouring 1300 ml DI water into 4480 ml of Ludox SM with stirring, and then stirring a mixture of 6.4 grams of Corsheen CorAdd 9195 and 480 ml DI water into that. Both Solution A and Solution B were then put through a 0.1 micron filter to remove any particles that might cause scratching. Solution B was then poured into Solution A over a 5 second period with strong mixing to form the slurry. The final pH of the slurry was 1.2, while its final volume 8 liters.
[0092] The slurry was used to superfinish a 95 mm aluminosilicate glass disk substrate 1.0 psi-disk for 12 minutes on a conventional double-sided polishing machine. The slurry temperature was 20-35 C.
[0093] After coming off the polishing machine, the disk substrat...
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