The invention relates to a data flow-based deterministic network integrity fault detection method. The method includes the steps of: according to a topological structure of a whole deterministic network, establishing a data flow-based triad model; by determining a priority relation of data integrity, source integrity, order integrity and time integrity, analyzing granularity required by a user, and aiming at hardware faults, logic faults and configuration information faults, making a fault mode analysis; on this basis, performing fault tree analysis, proposing a measurable and computational bottom event probability acquisition method, and performing qualitative and quantitative calculation; and finally completing fault detection. Aiming at the problem that a conventional fault detection method serial-parallel model cannot complete fault positioning in practical engineering, the problems of deterministic network data accuracy and integrity fault detection are solved. A method having engineering value is provided for integrity research of deterministic networks such as an aviation airborne network, an industrial control network and a military communication network.