Ultra-short cavity semiconductor laser and preparing method thereof
An ultra-short cavity, semiconductor technology, used in semiconductor lasers, lasers, laser parts and other directions, can solve the problems of difficult manufacturing process, low yield, and cannot be smaller than 250μm, and achieves simple process, high repeatability, and yield. high effect
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example 1
[0037] Refer to Figure 2 and Figure 3: Both ends of the cavity use a micro-cleavage process, which in turn includes the following steps:
[0038] A. Use the MOCVD system to sequentially grow N-type indium phosphide lower transition layer 2-1, N-type selective etching sacrificial layer 2-2, and N-type indium phosphide on the top surface of N-type (100) indium phosphide substrate 1 Upper transition layer 2-3, N-type indium phosphide confinement layer 2-4, quantum well structure layer 3, P-type confinement layer 4, P-type ohmic contact layer 5, and P-type electrodes are plated on the P-type ohmic contact layer 5 Metal film 6, N-type selective etching sacrificial layer 2-2 uses indium aluminum gallium arsenide, quantum well structure layer 3 uses indium gallium arsenide phosphorus, P-type confinement layer 4 uses indium phosphide, and P-type ohmic contact layer 5 uses indium gallium Arsenic phosphorus
[0039] B. On the surface of the P-type electrode metal film 6, two "V"-shaped groo...
example 2
[0048] Refer to Figure 4 and Figure 5: One end of the cavity uses a micro-cleavage process, and the other end uses a common cleavage method, which includes the following steps in turn:
[0049] A. Use the MOCVD system to sequentially grow N-type indium phosphide lower transition layer 2-1, N-type selective etching sacrificial layer 2-2, and N-type indium phosphide on the top surface of N-type (100) indium phosphide substrate 1 Upper transition layer 2-3, N-type indium phosphide confinement layer 2-4, quantum well structure layer 3, P-type confinement layer 4, P-type ohmic contact layer 5, and P-type electrodes are plated on the P-type ohmic contact layer 5 Metal film 6, N-type selective etching sacrificial layer 2-2 uses indium gallium arsenide phosphorus, quantum well structure layer 3 uses indium aluminum gallium arsenide, P-type confinement layer 4 uses indium phosphide, and P-type ohmic contact layer 5 uses indium aluminum arsenic;
[0050] B. On the surface of the P-type elec...
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