A photoresist developer
A developing solution and photoresist technology, applied in the field of developing solution, can solve the problem that the developing solution cannot simultaneously take into account developability, defoaming property, and dispersion stability developing solution, etc., and achieve excellent comprehensive performance, good development and dispersion stability , strong defoaming effect
Inactive Publication Date: 2009-11-04
深圳市合力泰光电有限公司
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- Abstract
- Description
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- Application Information
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Problems solved by technology
[0007] The present invention aims to overcome the defect that the developing solution in the prior art cannot simultaneously take into account developability, defoaming property, and dispersion stability or needs to add a defoaming agent to improve the defoaming property of the developing solution, and provides a solution that can be used in use. Developer composition that simultaneously improves developability, defoaming property, and dispersion stability
Method used
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Examples
Experimental program
Comparison scheme
Effect test
Embodiment 1
[0038] This example is used to illustrate the preparation of the developer solution of the present invention.
[0039] 0.6 parts by weight of 2-[polyethylene oxide-3,5-diphenethyl phenyl ether] ethane (ethylene oxide 9 mole adduct) and 0.5 parts by weight of KOH were added to 98.9 parts by weight Parts of water, at room temperature, under stirring conditions to prepare the developer solution S1.
Embodiment 2
[0041] This example is used to illustrate the preparation of the developer solution of the present invention.
[0042] The basic steps are the same as those in Example 1, except that the components and contents of the developer are different, and thus the developer S2 is prepared, as shown in Table 1.
[0043] Buy Example 3-16
[0044] Developers S3-S16 of Examples 3-16 in Table 1 can be prepared by using Gemini-type surfactants P1-P4 and different components and contents respectively.
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Abstract
A photoresist developing solution, which contains Gemini type surfactant, basic compound and solvent, wherein, Gemini type surfactant has following structural formula: In the formula, R1, R2, R3, R4, R5, R'1, R'2, R'3, R'4, and R'5 are independently selected from hydrogen, alkyl, aryl, aralkyl, and halogen; R6 is 2 to 6 methylene groups; n is 6-23 Integer; the developing solution of the present invention can obtain very good developability, defoaming property, and dispersion stability without adding a defoamer, and the image has no residue.
Description
technical field [0001] The invention relates to a developing solution, in particular to an alkaline aqueous photoresist developing solution used for image formation after photoresist exposure. Background technique [0002] Photoresists are widely used in the formation of wiring patterns for integrated circuits, printed circuit boards, color liquid crystal devices, or color filters. In the formation process of the wiring pattern, the pigment dispersion, solvent, photosensitive resin and related additives are first mixed to prepare a photoresist, and then the photoresist is coated on the substrate and pre-baked, and then exposed with a photomask , and then wash off the photoresist on the unexposed part with a developing solution, and then the photoresist film with the desired pattern can be obtained. Coating methods include dyeing method, printing method, electrodeposition method and pigment dispersion method, and common development methods include dipping development, shakin...
Claims
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IPC IPC(8): G03F7/32
Inventor 金启明陈学刚董俊卿宫清何志奇
Owner 深圳市合力泰光电有限公司