Microelectron-mechanical reconfigurable broad band microwave power detector and method of manufacturing the same
A technology of micro-electronic machinery and microwave power, which is applied in the direction of electric power measurement by thermal method, microstructure technology, microstructure device, etc., can solve the problems that microwave power cannot be directly received, and achieve the effect of ultra-bandwidth
Inactive Publication Date: 2009-11-18
SOUTHEAST UNIV
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Problems solved by technology
Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission lines such as coaxial cables as microwave signal input and connection devices, which cannot directly receive microwave power.
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[0034] The present invention forms a coplanar waveguide antenna capable of receiving microwave signals in different frequency bands on a gallium arsenide substrate by changing the shape of the antenna, and controls the change of the antenna shape through a micromechanical capacitive series switch. The coplanar waveguide transmission line There are two resistors connected in parallel at the terminal as microwave load resistors. The load resistors cause the thermopile on the outside to generate heat through heating. The thermopile produces cold and hot nodes due to uneven heating, forming a temperature difference. The two output terminals of the stack generate a DC voltage, which is output by two welding blocks, and the output thermal voltage is proportional to the input microwave power to be measured, and the value of the microwave power can be obtained by measuring this voltage.
[0035] The substrate of the sensor is a gallium arsenide substrate 9, on the gallium arsenide subs...
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Abstract
The MEMS reconfigurable broadband microwave power sensor is a sensor that uses a coplanar waveguide antenna to receive microwave power to cause resistance heating, and measures the microwave signal amplitude through a thermopile. The sensor is formed on a gallium arsenide substrate (9) to form a coplanar waveguide antenna (4) working in different frequency bands, and the coplanar waveguide antenna (4) is controlled to work in different frequency bands through a micromechanical capacitive series switch (4). frequency band, the coplanar waveguide antenna (4) is connected to the coplanar waveguide transmission line (5) to transmit microwave signals, and there are two parallel resistors at the end of the coplanar waveguide transmission line (5) as the load resistance (11), and the load resistance (11) The heating causes the heating of the thermopile (6) outside it, and the temperature difference of the thermopile (6) is generated due to the uneven heating, and the temperature difference causes the thermopile (6) to produce the Seebeck effect, and a DC voltage output is generated at both ends , and the output voltage is proportional to the input microwave power to be measured, and the value of the microwave power can be obtained by measuring this voltage.
Description
technical field [0001] The invention uses a reconfigurable antenna to receive microwave power in different frequency bands, transmits the microwave power to the terminal load resistance through a coplanar waveguide, uses a thermopile to measure the calorific value of the resistance and converts it into a thermoelectric potential output, thereby realizing the measurement of the microwave power. It belongs to the field of microelectromechanical systems. Background technique [0002] In microwave research, microwave power is an important parameter to characterize microwave signal characteristics. In microwave wireless application and measurement technology, the detection of microwave power is a very important part. Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission lines such as coaxial cables as microwave signal input and connection devices, which cannot directly receive microwave power. [0003] Over the past ...
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IPC IPC(8): G01R21/02G01R21/04B81B7/02B81C1/00
Inventor 廖小平田涛
Owner SOUTHEAST UNIV