Surfactant

A surfactant and detergent technology, applied in the field of surfactants, can solve problems such as foaming, insufficient reduction of particle surface ξ potential, substrate surface latent damage, etc.

Inactive Publication Date: 2007-08-01
SANYO CHEM IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, since the surfactant proposed in the above-mentioned Patent Document 1 is a nonionic surfactant, the zeta potential of the particle surface cannot be sufficiently lowered, and the re-adhesion prevention property is insufficient.
The surfactant proposed in the above-mentioned Patent Document 2 is an anionic surfactant, and although the effect of preventing reattachment of the particles can be improved to some extent by lowering the zeta potential of the particle surface, the performance is not sufficient.
Moreover, the use of alkali metals such as sodium ions as the counter ion of the anionic surfactant used has the following serious problems: latent damage or destruction of the substrate surface caused by the alkali metal remaining after washing, Reduced reliability of equipment caused by inside the substrate, severe foaming during use, etc.

Method used

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Examples

Experimental program
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Embodiment 1～2

[0342] A vertical chromatographic tube with a diameter of 3 cm and a length of 50 cm was filled with cation exchange resin "Amberlite IR-120B" (Organo Co., Ltd.), and 150 parts of sodium naphthalenesulfonate formaldehyde condensate was slowly added at 25°C from the top of the column. Salt "Bemol NL" (manufactured by Kao Corporation) was adjusted to an aqueous solution having a solid content of 10%. The eluate that has passed through the ion exchange resin is passed over the column again. This operation was repeated until the sodium content of the eluent using ICP (ICPS-8000 manufactured by Shimadzu Corporation) was less than 1 ppm to obtain 100 parts of a 9% aqueous solution of naphthalenesulfonic acid formaldehyde condensate.

[0343] Then, the 9% aqueous solution of 100 parts of naphthalenesulfonic acid formaldehyde condensate obtained is packed in the reaction vessel with stirring device that can be controlled in temperature, and the temperature is adjusted to 25 ℃, while s...

Embodiment 3

[0345] Operate in the same manner as in Example 1 to obtain a 9% aqueous solution of naphthalenesulfonic acid formaldehyde condensate, and 100 parts of naphthalenesulfonic acid formaldehyde condensate 9% aqueous solution is packed in a reaction vessel with a stirring device that can be controlled in temperature, and 3.7 parts of Guanidine carbonate (produced by Wako Pure Pharmaceutical Co., Ltd.), overheated and stirred for 10 minutes at 50° C., obtained 103 parts of surfactants of the present invention (at 25° C. pH = 6.4). In addition, the weight average molecular weight of (S2) was 5000.

Embodiment 4

[0347] Using polystyrenesulfonic acid sodium salt "POLITY PS-1900" (manufactured by Lion Corporation) instead of naphthalenesulfonic acid formaldehyde condensate sodium salt, it was carried out in the same manner as in Example 1 to obtain 100 parts of a 9% aqueous solution of polystyrenesulfonic acid. Put 100 parts of 9% aqueous solution of polystyrene sulfonic acid in a temperature-controlled reaction vessel with a stirring device, add 7.4 parts of DBU, and stir for 10 minutes at 25°C to obtain 107 parts of polystyrene sulfonic acid DBU Surfactant according to the invention consisting of a 15% aqueous solution of salt (S3) (pH=6.5 at 25°C). In addition, the weight average molecular weight of (S3) was 14000.

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Abstract

To provide a surfactant which is obtainable by using substantially no alkali metal, has excellent readhesion prevention ability of finely-pulverized particles at the time of cleaning, and is capable of quite efficient and advanced cleaning. In the present invention, a surfactant which comprises a neutralized salt (AB1) and / or neutralized salt (AB2) is used. Neutralized salt (AB1): a neutralized salt (AB1) which comprises an acidic compound (A1) containing at least each one of an acid group (X1) of an acid having the difference of heat of formation in an acid dissociation reaction (Q1) of 3 to 200 kcal / mol and a hydrophobic group (Y) containing 1 to 36 carbon atoms, and a nitrogen-containing basic compound (B) having the difference of heat of formation in a proton addition reaction of 10 to 152 kcal / mol, wherein (X1) is at least one species selected from a sulfonic acid group, and the like. Neutralized salt (AB2): a neutralized salt (AB2) which comprises a polymer (A2) having at least one acid group (X2) within the molecule, and the nitrogen-containing basic compound (B) having the difference of heat of formation in a proton addition reaction of 10 to 152 kcal / mol.

Description

technical field [0001] The present invention relates to surfactants. More specifically, it relates to a surfactant preferably used as a detergent used in a washing process in the production process of electronic materials, electronic parts, and the like. Background technique [0002] In recent years, with the advancement of microfabrication technology represented by super LSI, etc., trace impurities (metal ions, metal and other inorganic substances and organic substances such as anti-corrosion resin particles) remaining on the substrate have a great impact on the performance and pass rate of the equipment. Therefore, the management of impurities has become particularly important. In particular, particles to be cleaned become more micronized and adhere to the surface more easily, so it is urgently necessary to establish a high-level cleaning technology. [0003] Therefore, conventionally, in order to prevent such particle contamination, a method of reducing the zeta potenti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C11D1/02C23G1/02H01L21/304
CPCC11D1/04C11D1/143C11D1/146C11D1/22C11D1/342C11D1/345C11D1/37C11D11/0047C11D2111/22C11D1/02C11D1/83C11D2111/46
Inventor 铃木一充山口俊一郎
Owner SANYO CHEM IND LTD
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