Diamond covered substrate, filtration filter, and electrode

A technology for covering substrates and diamonds, applied in the direction of electrodes, filtration separation, electrode shape/type, etc., can solve the problems of substrate corrosion, poor electrolysis efficiency, and inability to continue electrolysis, and achieve the effect of reducing stress and preventing corrosion.

Inactive Publication Date: 2007-12-19
SUMITOMO ELECTRIC IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The object of the present invention is to provide a substrate that can be used as an electrode, so as to solve the above-mentioned problems that the electrolysis cannot be continued due to the corrosion of the substrate itself, or the peeling of the diamond layer and the substrate, or the electrolysis efficiency is significantly deteriorated in the electrochemical oxidation treatment.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Using the substrates shown in Table 1, a conductive diamond layer was formed. The diameter of the open pores of the substrate is about 1 μm. Scratch treatment is performed using diamond powder as pretreatment, or ultrasonic treatment is performed in a solution in which diamond powder is dispersed. Change the size of the diamond powder to 0.2 μm to 3.0 μm.

[0041] In the synthesis by the hot wire CVD method, the gas pressure was set to 60 Torr, the flow rate of hydrogen was set to 3000 sccm, and the flow rate of methane was set to a range of 0.5 to 5.0 sccm. In addition, diborane gas was used as a boron source. The flow rate is supplied at a concentration in the range of 0.2 to 1.0% relative to methane. The temperature of the substrate was set at 700 to 1000°C. In addition, in the case of the microwave CVD method, the microwave frequency was set to 2.4 GHz, and the microwave output was set to 5 kW. The content of boron is in the range of 10ppm~10000ppm.

[0042] A...

Embodiment 2

[0047] As shown in Table 2, conductive diamond films were formed on porous substrates with varying pore diameters. The prepared diamond is used to cover the substrate, the solution is supplied from one side of the substrate, and the solution is sent to the opposite side using a pump to circulate the solution. A solution obtained by mixing an organic mixed solution containing trichlorethylene and acetone and a slurry-like precipitate containing diamond powder in a 0.1 M sulfuric acid solution was used. Electrochemical oxidation treatment is performed simultaneously with the filtration treatment of this solution. First, the solution was circulated and filtered for 4 hours.

[0048] Table 2

[0049] No.

[0050] In No. 2-1, the maximum value of the open pore diameter was less than 0.1 μm, and the porous substrate was clogged by diamond during diamond film formation, so that the solution could not flow through. As shown in Nos. 2-2 and 2-3, when the diameter of the op...

Embodiment 3

[0052] As shown in Table 3, conductive diamond films were formed on porous substrates with different substrate materials. Electrochemical oxidation treatment was performed in the same manner as in Example 1. When the corrosion of the substrate occurred during the treatment, it was indicated by x, and when it did not occur, it was indicated by ◯. In addition, the current density is further set to 1.5A / cm 2 And continue to carry out electrochemical oxidation treatment for 100 hours (referred to as electrolytic treatment 2). When peeling occurred between the substrate and the diamond film, it was indicated as x, and when it did not occur, it was indicated as ◯.

[0053] table 3

[0054] No.

[0055] The substrate materials of No. 3-1 to 3-6 can be stably processed even when electrochemical oxidation treatment is performed. In the other Nos. 3-7 and 3-8, the electroconductive diamond layer was not covered, corrosion occurred at the part of the substrate directly in c...

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PUM

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Abstract

By providing a substrate that can be used as an electrode, the invention solves the problem of corrosion of the substrate itself during an electrochemical oxidation treatment, the problem of discontinued electrolysis caused by delamination between a diamond layer and a substrate, or the problem of severely impaired electrolysis efficiency. The present invention is a diamond-covered substrate comprising a substrate and a conductive diamond layer covering the substrate, wherein the largest area of the portion where the diamond comprising the diamond layer is continuous ranges from 1 mum<2 >to 1,000 mum<2>. Preferably, the substrate is porous and has open pores, and the open pores preferably have a diameter from 0.1 mum to 1,000 mum.

Description

technical field [0001] The present invention relates to a composite substrate covered with a diamond layer on a porous substrate, and a filter and an electrode using the composite substrate. Background technique [0002] Diamond has special properties, and various application products utilizing them have been put into practical use. Diamond is chemically and physically stable, and is usually an insulator, but it can be given conductivity by adding impurities such as boron and nitrogen. [0003] In recent years, in terms of industry, waste, drainage, and recycling technologies of materials have developed rapidly. As one of them, there is a drainage filtration method using a ceramic filter. However, existing ceramic filters can corrode when used in extremely aggressive solutions or environments. [0004] In addition, in order to reduce unwanted organic compounds in the waste liquid, a technique of performing electrochemical oxidation treatment is known. Electrodes used in ...

Claims

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Application Information

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IPC IPC(8): C23C16/27C25B11/03B01D39/20C25B11/06C02F1/46C30B29/04
Inventor 泉健二关裕一郎今井贵浩
Owner SUMITOMO ELECTRIC IND LTD
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