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Method for simulating complex environment in low earth orbit space, and equipment of use

A technology of space recombination and low-Earth orbit, applied to chemical instruments and methods, instruments, laboratory appliances, etc., can solve the problems of insufficient atomic oxygen energy, low atomic oxygen energy, and low flux of atomic oxygen beams, and achieve The effect of technical ease

Inactive Publication Date: 2007-12-26
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Although the current ground simulation method has made great progress compared with the previous ones, there are still some problems: first, it can only simulate the environment with one or two factors, such as atomic oxygen, atomic oxygen + ultraviolet, etc.; second, The atomic oxygen beam flux (AO flux) obtained by various ground simulation methods is relatively low, generally 10 14 -10 15 atoms·cm -2 the s -1 , than the required flux of atomic oxygen beam by 10 16 atoms·cm -2 the s -1 1-2 orders of magnitude lower; again, the energy of atomic oxygen produced is low, and the energy of oxygen atoms is generally less than 1eV, that is, the energy of atomic thermal motion, which cannot reach the energy of atomic oxygen in the LEO environment--5eV
Research on compound effects of space environment is still in its infancy

Method used

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  • Method for simulating complex environment in low earth orbit space, and equipment of use
  • Method for simulating complex environment in low earth orbit space, and equipment of use
  • Method for simulating complex environment in low earth orbit space, and equipment of use

Examples

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Embodiment 1

[0031] As shown in Figure 1, the device used in the method of the present invention is composed of a vacuum chamber 2, a target 1, a magnetic coil and a sample stage 7, wherein the vacuum chamber 2 as a whole is cross-shaped, and the middle part is provided with a 45° angle with the sample stage 7 directly below. The target; the side wall of the vacuum chamber is connected to the microwave source through the quartz window 9, the waveguide is connected to the oxygen generator through the pipeline; the magnetic force coil is arranged on the side wall of the vacuum chamber 2, and the magnetic field lines generated by it pass through the surface of the target 1. , the magnetic field is a horizontal magnetic field; the target 1 is a stacked structure of metal molybdenum sheet and stainless steel, and a voltage-adjustable DC power supply is positively connected to the shell of the vacuum chamber 2 and negatively connected to the target 1 . The ultraviolet light source 3 is installed ...

Embodiment 2

[0037] The difference from Example 1 is:

[0038] Device (see Fig. 1): turn on the ultraviolet light source 3 (the present embodiment adopts an ultraviolet deuterium lamp); the sample table 7 is a hollow cylinder, the middle of which is provided with liquid nitrogen (a liquid nitrogen inlet 5 is provided), and the side wall is provided with a heating device 4 (platinum resistance wire); the sample stage is also used as a small temperature control platform.

[0039] Method: Coating a layer of SiO with a thickness of about 1 μm on polyimide by magnetron sputtering 2 film, put the sample on the sample stage, and evacuate the vacuum chamber to 1.2×10 -4 A 30 minute vacuum pre-out was performed. Then under the condition that the microwave power is 2000W and the oxygen flow rate is 5SCCM, the sample stage is adjusted to 9cm away from the target, the magnetic field (intensity is 0.7mT) and the microwave source are turned on, and a 30V negative bias is applied on the target. A 15eV...

Embodiment 3

[0041] The difference from Example 2 is:

[0042] The size after ultrasonic cleaning with acetone is 30×30×0.5mm 3 Put the polyimide on the sample stage, and evacuate the vacuum chamber to 1.2×10 -4 A vacuum pre-out was performed for 60 minutes. Then under the condition that the microwave power is 500W and the oxygen flow rate is 0.5SCCM, adjust the sample stage to 9cm away from the target, turn on the magnetic field (adjust the magnetic field strength to 0.9mT) and the microwave source, and apply a 20V negative bias on the target. At this time, a 6.5 eV oxygen atom flow is generated in the vacuum chamber. Adjust the pressure of feeding liquid nitrogen to 0.01MPa, and the heating power to 30W; turn on the power supply of the ultraviolet light source (ultraviolet deuterium lamp, the wavelength is 115-400nm), irradiate the sample stage, adjust the distance between the ultraviolet light source and the sample stage to be 7cm, and the radiation intensity is about 5 suns; samples...

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Abstract

A device used for simulating space composite environment near ground orbit is prepared for carrying out vacuum preair-out of vacuum chamber by vacuuming, leading oxygen in, utilizing magnetic field and microwave to couple with oxygen for generating oxygen plasma by electric-discharging, impacting target being exerted with negative bias voltage by oxygen plasma under magnetic field constraint to convert oxygen plasma to be neutral oxygen atom for generating space composite environment near ground orbit at sample table.

Description

technical field [0001] The invention belongs to special environment simulation technology, in particular to a method for simulating a low earth orbit space (low earth orbit, LEO) composite environment and a device used therefor. Background technique [0002] Since the discovery of the LEO space effect, various LEO environmental simulation devices have emerged in an endless stream. On the one hand, it verifies the existence of the LEO space environment effect; on the other hand, it opens up a new way to study the LEO space effect, which greatly reduces the research cost of the space effect. [0003] Factors in the LEO environment include atomic oxygen (AO), ultraviolet light, temperature cycles, and micrometeorites. Among them, atomic oxygen is the most important factor in the LEO environment. In recent years, the recombination effect of atomic oxygen + ultraviolet radiation has been proved to exist. Research on compound effects has been paid attention to. Since the compo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N37/00B01L1/00
Inventor 李美栓胡龙飞周延春
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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