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Microelectron-mechanical reconfigurable broad band microwave power detector and method of manufacturing the same

A technology of micro-electronic machinery and microwave power, which is applied in the direction of electric power measurement by thermal method, microstructure technology, microstructure device, etc., can solve the problems that microwave power cannot be directly received, and achieve the effect of ultra-bandwidth

Inactive Publication Date: 2008-02-27
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission lines such as coaxial cables as microwave signal input and connection devices, which cannot directly receive microwave power.

Method used

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  • Microelectron-mechanical reconfigurable broad band microwave power detector and method of manufacturing the same
  • Microelectron-mechanical reconfigurable broad band microwave power detector and method of manufacturing the same
  • Microelectron-mechanical reconfigurable broad band microwave power detector and method of manufacturing the same

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Embodiment Construction

[0034] The present invention forms a coplanar waveguide antenna capable of receiving microwave signals in different frequency bands on a gallium arsenide substrate by changing the shape of the antenna, and controls the change of the antenna shape through a micromechanical capacitive series switch. The coplanar waveguide transmission line There are two resistors connected in parallel at the terminal as microwave load resistors. The load resistors cause the thermopile on the outside to generate heat through heating. The thermopile produces cold and hot nodes due to uneven heating, forming a temperature difference. The two output terminals of the stack generate a DC voltage, which is output by two welding blocks, and the output thermal voltage is proportional to the input microwave power to be measured, and the value of the microwave power can be obtained by measuring this voltage.

[0035] The substrate of the sensor is a gallium arsenide substrate 9, on the gallium arsenide subs...

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Abstract

A microwave power sensor of reconstructed broad band by micro-electronics machine is to receive the microwave power by the coplanarity radiating guide to make resistance heat and get the microwave signal range by the thermopile. The sensor is to form the radiating coplanarity wave guide with different frequency on gallium arsenide underlay and control it working in different frequency by micro-machine condenser series switches; the coplanarity radiating guide connected with the wave-guide transmission line is to transfer the microwave signal. The two shunt-wound resistances at terminal of coplanarity waveguide transmission line are as load resistance which radiates to make the out thermopile heat; it can generate the temperature difference because of non-uniform heat which make the thermopile generate Seebeck effect and output the volts DC in two ends. The voltage is direct ratio with the measured microwave power, so the microwave power can be get by measured the voltage.

Description

technical field [0001] The invention uses a reconfigurable antenna to receive microwave power in different frequency bands, transmits the microwave power to the terminal load resistance through a coplanar waveguide, uses a thermopile to measure the calorific value of the resistance and converts it into a thermoelectric potential output, thereby realizing the measurement of the microwave power. It belongs to the field of microelectromechanical systems. Background technique [0002] In microwave research, microwave power is an important parameter to characterize microwave signal characteristics. In microwave wireless application and measurement technology, the detection of microwave power is a very important part. Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission lines such as coaxial cables as microwave signal input and connection devices, which cannot directly receive microwave power. [0003] Over the past ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R21/02G01R21/04B81B7/02B81C1/00
Inventor 廖小平田涛
Owner SOUTHEAST UNIV
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