Method for impacting micro-plasticity forming with strong laser and device thereof

A microplastic, strong laser technology, applied in microstructure devices, laser welding equipment, chemical instruments and methods, etc., can solve the problems of complex process and restrict the wide application of microfabrication technology, and achieve improved sensitivity and broad industrial application prospects. , Improve the effect of surface hardness

Inactive Publication Date: 2008-09-03
JIANGSU UNIV
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  • Abstract
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Problems solved by technology

Although LIGA technology has outstanding forming advantages, its process is relatively complicated. In order to obtain X light source, expensive synchrotron is required.
[0005] However, the inherent characteristics of large bat

Method used

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  • Method for impacting micro-plasticity forming with strong laser and device thereof
  • Method for impacting micro-plasticity forming with strong laser and device thereof
  • Method for impacting micro-plasticity forming with strong laser and device thereof

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Embodiment Construction

[0022] figure 1 Shown is a schematic diagram of the laser-driven flyer loading device to realize the formation of three-dimensional structures at the micro-nano scale. The details and implementation are described as follows:

[0023] The laser-driven flyer loading device to realize micro-nano scale forming three-dimensional structure consists of a laser drive system and a target clamping system. The laser drive system consists of a nanosecond pulse laser 1 and a focusing lens 3. The laser beam 2 emitted by the nanosecond pulse laser 1 is focused by the lens and directly enters the target clamping system. The target clamping system is composed of a pressure plate 4, optical glass 5, flyer 6, target material 7, template 8, and target clamper 9. The pressure plate 4 has a screw mechanism and can be screwed into the concave hole of the target clamper 9. Cavity, so that the optical glass 5 can be pressed together, and the target material 9 can be fastened in the concave cavity of ...

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Abstract

A plastic micro-forming method by using strong laser shock and a device thereof belong to the field of micro-electro-mechanical system (MEMS) processing and laser micro-processing technology. The method is characterized in that the method comprises the following steps: polishing both sides of a target for experiment by electrolysis; pressing a transparent optical medium with a thickness of micrometer level on a press plate as a constrained layer; tightly pressing a metal flying plate on the optical medium; fastening the optical medium, the metal flying plate, the target and a template on a special target clamping machine through the press plate; turning on a nano-second pulsed laser; adjusting the optical path to focus the laser outputted from the nano-second pulse laser on the target surface; subjecting the nano-second pulsed laser to single emission to achieve single pulse laser shock on the target. The method can generate ultrahigh pressure and strain rate during production of a sample, and the application of pressure of the generated shock wave has higher planarity, completeness and repeatability, thus improving surface rigidity of micro-metal parts and improving micro-sensing sensitivity. Accordingly, a micro-driving device can provide higher drive force, torsional moment and energy.

Description

technical field [0001] The invention belongs to the field of microelectromechanical system (MEMS) processing technology and laser micromachining, and particularly refers to a method and device for strong laser shock microplastic forming. Nanosecond pulse laser is used to irradiate the surface of metal flyer material to vaporize the surface layer. A high-temperature and high-pressure plasma is formed, and the rapid expansion and explosion of the plasma drives the flyer. The flyer flies and hits at high speed, and the metal target generates shock waves to cause plastic deformation at the micro-nano scale. Background technique [0002] With the development of modern science and technology, the trend of miniaturization of products is accelerating, and the demand for micro and small parts is also increasing. Manufacturing has become an important research object in the industry. Although microfabrication methods can be used to directly form tiny components used in MEMS, it is eas...

Claims

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Application Information

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IPC IPC(8): B23K26/18B81C5/00B81C99/00
Inventor 周明蔡兰黄涛李保家
Owner JIANGSU UNIV
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