Method for impacting micro-plasticity forming with strong laser and device thereof

Abstract

A plastic micro-forming method by using strong laser shock and a device thereof belong to the field of micro-electro-mechanical system (MEMS) processing and laser micro-processing technology. The method is characterized in that the method comprises the following steps: polishing both sides of a target for experiment by electrolysis; pressing a transparent optical medium with a thickness of micrometer level on a press plate as a constrained layer; tightly pressing a metal flying plate on the optical medium; fastening the optical medium, the metal flying plate, the target and a template on a special target clamping machine through the press plate; turning on a nano-second pulsed laser; adjusting the optical path to focus the laser outputted from the nano-second pulse laser on the target surface; subjecting the nano-second pulsed laser to single emission to achieve single pulse laser shock on the target. The method can generate ultrahigh pressure and strain rate during production of a sample, and the application of pressure of the generated shock wave has higher planarity, completeness and repeatability, thus improving surface rigidity of micro-metal parts and improving micro-sensing sensitivity. Accordingly, a micro-driving device can provide higher drive force, torsional moment and energy.

Description

technical field [0001] The invention belongs to the field of microelectromechanical system (MEMS) processing technology and laser micromachining, and particularly refers to a method and device for strong laser shock microplastic forming. Nanosecond pulse laser is used to irradiate the surface of metal flyer material to vaporize the surface layer. A high-temperature and high-pressure plasma is formed, and the rapid expansion and explosion of the plasma drives the flyer. The flyer flies and hits at high speed, and the metal target generates shock waves to cause plastic deformation at the micro-nano scale. Background technique [0002] With the development of modern science and technology, the trend of miniaturization of products is accelerating, and the demand for micro and small parts is also increasing. Manufacturing has become an important research object in the industry. Although microfabrication methods can be used to directly form tiny components used in MEMS, it is eas...

AI Technical Summary

Problems solved by technology

Although LIGA technology has outstanding forming advantages, its process is relatively complicated. In order to obtain X light source, expensive synchrotron is required.

[0005] However, the inherent characteristics of large batches, high efficiency, high precision, high density, short cycle, low cost, no pollution, and net shape required by the miniaturization industry restrict the wide application of the above-mentioned microfabrication technology.

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