Method for reinforcing zinc oxide thin membrane luminescence

A technology of zinc oxide film and reaction chamber, which is applied in the direction of vacuum evaporation plating, ion implantation plating, metal material coating technology, etc., can solve the problems of unrealized and light quenching of enhanced zinc oxide film, and achieve the realization of defects Effects of luminous quenching, enhanced luminous intensity, and simple method

Inactive Publication Date: 2008-09-24
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the surface plasmon absorption and scattering of silver nanoparticles are related to the shape, size and surrounding medium of the particles, and the enhancement of light depends on the position of the extinction resonance wavelength of silver nanoparticles rela...

Method used

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  • Method for reinforcing zinc oxide thin membrane luminescence
  • Method for reinforcing zinc oxide thin membrane luminescence
  • Method for reinforcing zinc oxide thin membrane luminescence

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Take the following steps: put the quartz substrate with zinc oxide film grown in the reaction chamber of the DC magnetron sputtering device, and the vacuum degree of the reaction chamber is evacuated to 5×10 -3 Pa, heat the substrate so that the temperature of the substrate is 200°C, then pass in argon as a protective gas, control the gas flow at 30sccm, adjust the pressure in the reaction chamber to 10Pa, and use silver with a purity of 99.99% as the target for sputtering deposition. The sputtering current and power were controlled at 0.2A and 60W, respectively, and the sputtering time was 20s.

Embodiment 2

[0019] The steps are the same as in Example 1, except that the sputtering time is 60s.

Embodiment 3

[0021] The steps are the same as in Example 1, except that the sputtering time is 85s.

[0022] The silver nanoparticles deposited on the surface of the zinc oxide film in the present invention are oblate (such as figure 2 shown).

[0023] image 3 The fluorescence spectra of ZnO thin films before and after sputtering silver nanoparticles for different times are given. It can be seen from the figure that when the sputtering time is in the range of 20s-85s, the interband luminescence of the zinc oxide thin film can be enhanced by up to 3 times, while the defect luminescence has been quenched to a certain extent.

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Abstract

The invention discloses a method for enhancing a zinc oxide film to shine which adopts magnetron sputtering to grow silver nanoparticles on the zinc oxide film. The preparation of the invention relates to: putting a quartz floor with a grown zinc oxide film into the reaction chamber of a DC reaction magnetron sputtering device; depositing the silver nanoparticles on the zinc oxide film by DC magnetron sputtering. The invention can be adopted to enhance the shining efficiency of the zinc oxide film. The method is simple, the structure of the whole shining system is easy; the shining enhancing can be controlled by the sputtering time; besides, interband shining enhancing and defect shining quenching can be realized simultaneously; the method can be used for enhancing the shining intensity of the shining materials like zinc oxide, etc.

Description

technical field [0001] The invention relates to a method for enhancing the luminescence of a zinc oxide thin film. Background technique [0002] ZnO is an important direct wide bandgap semiconductor material with a bandgap of 3.37eV at room temperature. It is an environmentally friendly material with abundant raw materials, low cost, non-toxic and pollution-free. Compared with the wide bandgap semiconductor gallium nitride (GaN), zinc oxide has higher exciton binding energy, so zinc oxide has higher blue light emission efficiency. In recent years, zinc oxide has attracted attention as an excellent luminescent material. [0003] Localized surface plasmons refer to charge density oscillations localized in the vicinity of metal nanoparticles. When the incident electromagnetic field (light) is resonantly excited with the plasma frequency, it can produce strong extinction (absorption and scattering) or enhancement of the local electromagnetic field. So far, the surface plasmo...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/18C23C14/54
Inventor 杨德仁李东升程培红
Owner ZHEJIANG UNIV
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