Method for controlling growing multiple layer film for making multiple-level micro-reflector
A micro-mirror and multi-layer film technology, applied in the field of multi-level micro-mirror production, can solve the problems of difficult to precisely control corrosion or etching depth, difficult to guarantee horizontal accuracy, poor accuracy and repeatability, etc. Repeatability, high level accuracy, high flatness effect
Active Publication Date: 2008-10-22
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Abstract
The invention relates to a method for producing a multi-stage microreflecting mirror by controlling the growth of a multi-layer film, which comprises the following steps that: a substrate is produced and is treated with cleaning; a first photomask is used to photoetch for forming a needed masking pattern, the width of a bright fringe and the width of a dark fringe of the first photomask are respectively L/2<1>; then coating material is deposited, photoresist and a film on the photoresist are peeled off, and a multi-stage film staircase is formed; each film layer staircase is orderly produced according to the method, the width of a bright fringe and the width of a dark fringe of the nth photomask are respectively L/2<n>, until the needed staircases are reached to finish the production of the substrate of a multi-stage microreflecting mirror; the produced substrate of the multi-stage microreflecting mirror is used as a template production mould, then a die casting method is used to produce a multi-stage staircase structure; and the surface of the multi-stage staircase structure or the substrate of the multi-stage microreflecting mirror is coated with a reflection increasing film. The method effective improves the longitudinal dimension accuracy and the repetitiveness of the staircase, has strong process controllability and good repetitiveness, does not use chemical etching, and reduces the pollution.
Application Domain
MirrorsPhotomechanical apparatus
Technology Topic
PhotoresistEtching +5
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PUM
Property | Measurement | Unit |
Surface roughness | 0.2 | nm |
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