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Orientational alignment carbon nano-tube and carbon coating cobalt nano-particle complex and preparation thereof

A carbon-coated cobalt nanometer and particle composite technology, applied in nanostructure manufacturing, nanotechnology, nanotechnology and other directions, can solve the problems of long reaction time, complex method, difficult application, etc., and achieves high work efficiency, simple operation, The effect of easy availability of raw materials

Inactive Publication Date: 2009-01-21
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the shortcomings of the above-mentioned method such as complexity, long reaction time, low yield, and difficult application, and provide a composite of aligned carbon nanotubes and carbon-coated cobalt nanoparticles and a preparation method thereof

Method used

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  • Orientational alignment carbon nano-tube and carbon coating cobalt nano-particle complex and preparation thereof
  • Orientational alignment carbon nano-tube and carbon coating cobalt nano-particle complex and preparation thereof
  • Orientational alignment carbon nano-tube and carbon coating cobalt nano-particle complex and preparation thereof

Examples

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Effect test

Embodiment 1

[0029] Example 1: The steps of the preparation method of this embodiment are:

[0030] (1) Using the RF magnetron sputtering method, using Co as the target source and Ar as the discharge gas, the Co film is deposited on the Si substrate. The deposition system is a DPS-III target magnet produced by the Shenyang Scientific Instrument Development Center of the Chinese Academy of Sciences. Controlled sputtering equipment, DC sputtering current is 0.1A, DC sputtering voltage is 280V, Ar gas flow is 60.2sccm, working pressure is 0.5Pa, and deposition time is 60s.

[0031] (2) Put the Co thin film obtained in step (1) into a plasma enhanced chemical vapor deposition equipment. The deposition system is a JGP300A high-vacuum single-target high-temperature coating equipment produced by the Shenyang Scientific Instrument Development Center of the Chinese Academy of Sciences, and it is evacuated to 5Pa. Access O 2 The flow rate is 2sccm, the working pressure is 20Pa, and the temperature is in...

Embodiment 2

[0034] Example 2: The preparation method steps of this embodiment are:

[0035] (1) Using the radio frequency magnetron sputtering method, using Co as the target source and Ar as the discharge gas, the Co film is deposited on the Si substrate. The deposition system is a DPS-III target magnet produced by the Shenyang Scientific Instrument Development Center of the Chinese Academy of Sciences. Controlled sputtering equipment, DC sputtering current is 0.1A, DC sputtering voltage is 280V, Ar gas flow is 60.2sccm, working pressure is 0.5Pa, and deposition time is 60s.

[0036] (2) Put the Co thin film obtained in step (1) into a plasma enhanced chemical vapor deposition equipment. The deposition system is a JGP300A high-vacuum single-target high-temperature coating equipment produced by the Shenyang Scientific Instrument Development Center of the Chinese Academy of Sciences, and the vacuum is evacuated to 5Pa. Access O 2 The flow rate is 2sccm, the working pressure is 20Pa, and the tempe...

Embodiment 3

[0039] Example 3: The preparation method steps of this embodiment are:

[0040] (1) Using the radio frequency magnetron sputtering method, using Co as the target source and Ar as the discharge gas, the Co film is deposited on the Si substrate. The deposition system is a DPS-III target magnet produced by the Shenyang Scientific Instrument Development Center of the Chinese Academy of Sciences. Controlled sputtering equipment, DC sputtering current is 0.1A, DC sputtering voltage is 280V, Ar gas flow is 60.2sccm, working pressure is 0.5Pa, and deposition time is 60s.

[0041] (2) Put the Co thin film obtained in step (1) into a plasma enhanced chemical vapor deposition equipment. The deposition system is a JGP300A high-vacuum single-target high-temperature coating equipment produced by the Shenyang Scientific Instrument Development Center of the Chinese Academy of Sciences, and the vacuum is evacuated to 5Pa. Access O 2 The flow rate is 2sccm, the working pressure is 20Pa, and the tem...

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Abstract

The invention relates to a carbon nano tube in an oriented array, a carbon-coated cobalt nano particle compound and a preparation method thereof. The preparation method comprises the following steps: firstly, a Co membrane is deposited on a Si substrate by means of magnetron sputtering; secondly, the Co membrane is oxidized during heating up plasma-enhanced chemical vapor deposition equipment so as to form small cobalt oxide nano particles; thirdly, working gas H2+CH4 is fed in so as to carry out deposition growth; and finally, the carbon nano tube in the oriented array and the carbon-coated cobalt nano particle composite material are obtained. The compound carbon nano tube is directionally perpendicular to the Si substrate, and the carbon-coated cobalt nano particle is adhered to the top surface of the carbon nano tube in the oriented array, wherein the carbon nano tube is a multi-wall carbon nano tube; moreover, the cobalt particle is monocrystal cobalt. The preparation method is simple and has the advantages of one-step finishing, easy control and convenient industrial production; moreover, the prepared composite material has an enormous application prospect in fields such as high-density magnetic recording material, wave absorption, biological medicine, electromagnetic screen, sensor and catalytic materials.

Description

Technical field [0001] The invention relates to a composite of aligned carbon nanotubes and carbon-coated cobalt nano particles and a simple preparation method thereof. Background technique [0002] Since the discovery of carbon nanotubes in 1991, it has attracted widespread attention with its unique structure and excellent performance. Carbon nanotubes are seamless, hollow tubes made of graphene sheets formed by carbon atoms. Both theoretical predictions and experimental studies show that carbon nanotubes have peculiar electrical, thermal, magnetic, optical and mechanical properties, and have broad application prospects in the fields of nanoelectronic devices, field emission materials, aerospace, hydrogen storage materials, and biomedicine. . Due to the small size, high chemical stability and large specific surface area of ​​carbon nanotubes, carbon nanotubes are considered to be the most ideal carrier for metal nanoparticles. Metal can be filled in the tube or attached to the o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B25/00C30B29/02C23C16/00C01B31/02B22F1/02B82B3/00
Inventor 郑伟涛亓钧雷胡超权王欣
Owner JILIN UNIV
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