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Silicon carbide boat cleaning method

A silicon carbide boat and a technology for cleaning silicon carbide boats are applied in the directions of cleaning methods, chemical instruments and methods, cleaning methods and utensils using liquids to achieve the effects of reducing production costs, eliminating stress and improving thermal stability.

Inactive Publication Date: 2009-02-04
HUZHOU DONGKE ELECTRONICS QUARTZ
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a cleaning method for silicon carbide boats with ideal cleaning effect and low cost.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] Example 1. When cleaning the silicon carbide boat, follow the steps below: (one hydrofluoric acid immersion, one annealing)

[0019] a. Clean the surface of the silicon carbide boat with detergent to remove grease and particles on the surface of the silicon carbide boat.

[0020] b. Soak the silicon carbide boat to be cleaned in aqua regia for 1 to 2 days to remove harmful metal impurities such as iron, manganese, copper, sodium, potassium, etc. left on the silicon carbide boat;

[0021] c. Soak it in 25% hydrofluoric acid for 12 hours to remove silicon-containing particle impurities precipitated on the surface of the silicon carbide boat;

[0022] d. According to the conventional process, the silicon carbide boat is flame-jet polished with a hydrogen-oxygen flame to further remove silicon-containing particle impurities or harmful metal impurities precipitated on the surface of the silicon carbide boat, such as iron, manganese, copper, sodium, potassium, etc.;

[0023...

Embodiment 2

[0026] Example 2. When cleaning the silicon carbide boat, follow the steps below: (four times of hydrofluoric acid immersion, three times of annealing)

[0027] a. Clean the surface of the silicon carbide boat with detergent to remove grease and particles on the surface of the silicon carbide boat.

[0028] b. Soak the silicon carbide boat to be cleaned in aqua regia for 1 to 2 days to remove harmful metal impurities remaining on the silicon carbide boat, such as iron, manganese, copper, sodium, potassium, etc.;

[0029] C, be soaked 12 hours with the hydrofluoric acid of 25% with mass percent concentration, to remove the particle impurity containing silicon that is separated out on the surface of silicon carbide boat; (one soaking)

[0030] d. Perform flame jet polishing on the silicon carbide boat with a hydrogen-oxygen flame to further remove silicon-containing particle impurities or harmful metal impurities such as iron, manganese, copper, sodium, potassium, etc. precipit...

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PUM

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Abstract

The invention discloses a carborundum boat washing method which includes the steps of cleaning the surface, soaking with aqua fortis, soaking with hydrofluoric acid, heat treatment, surface treatment, flame polish, etc. Through the step of soaking with aqua fortis, metal impurities such as iron, manganese, cuprum, natrium, kalium and the like left on the carborundum boat can be got rid of. The annealing treatment of putting the carborundum boat in an annealing furnace can accelerate the precipitation of the impurities in the carborundum boat, eliminate stress and improve thermal stability of the carborundum boat. The carborundum boat washed through the method is of nearly the same cleanliness, colour and luster and use effect with a new carborundum boat. The carborundum boat washing method is good in washing effect and the cost is only 1 / 10-1 / 30 of the cost of a new carborundum boat, thus greatly reducing production cost of the corporation.

Description

technical field [0001] The invention relates to a method for cleaning a silicon carbide boat. Background technique [0002] Silicon carbide boat is the carrier of large-scale integrated circuits in the process of ultra-high temperature processing, and plays an important role in the production process of semiconductor wafers. The silicon carbide boat has the characteristics of no deformation and durability under high temperature, but it needs to be cleaned after a period of use, otherwise the silicon carbide boat will be unusable. Since silicon carbide boats are mostly made of silicon carbide, this material is hard and brittle and difficult to process, so the price is very high. At present, the cleaning of silicon carbide boats is only simple soaking with hydrofluoric acid. The cleaning effect is not ideal and cannot meet the needs of use. There are still a large number of silicon carbide boats that cannot be used because they cannot be cleaned or the cleaning effect is not ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00H01L21/673B08B3/08
Inventor 张彩根
Owner HUZHOU DONGKE ELECTRONICS QUARTZ
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