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Cu-In-Ga-Se or Cu-In-Al-Se solar cell absorption layer target material and preparation method thereof

A solar cell, copper indium aluminum selenium technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the problem of affecting process implementation and industrial production, loss of In and Ga elements, affecting film performance, etc problems, to achieve the effect of easily forming a large area uniform film, avoiding the loss of elements, and avoiding adverse effects

Inactive Publication Date: 2011-08-17
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are two methods for selenization, one is to introduce H into the vacuum heat treatment furnace chamber 2 Se undergoes a chemical vapor phase reaction method, but due to the H 2 Se is a highly toxic and flammable gas, so this method is difficult to promote; the other is to pass solid selenium vapor into the vacuum heat treatment furnace chamber, and at a certain temperature, Se atoms react with Cu, In, and Ga atoms in the alloy prefabricated layer to form CIGS film
However, in the process of selenization, it is necessary to rapidly raise the temperature and cross the temperature range of 300-450 ° C, because it is easy to generate Ga in this temperature range, which is easy to volatilize. 2 Se, In 2 Se alloy phase, causing the loss of In and Ga elements in the CIGS film, affecting the performance of the film
However, the rapid heating and selenization temperature above 550°C will easily cause the temperature difference between the upper and lower substrates, resulting in softening or warping. For large-area glass substrates, it will also easily cause cracks, which will affect the process implementation and industrial production [Marianna Kemell, et.al ,Thin Film Deposition Methods for CuInSe 2 SolarCells, Critical Reviews in Solid State and Materials Sciences, 2005, 30, p1-31; F. Kessler, et.al, Approaches to flexible CIGS thin-film solarcells, Thin Solid Films, 2005, 480-481, p491-498]

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Will Cu 2 Se, In 2 Se 3 , Ga 2 Se 3 The powders (both purity ≥ 99.99%) are mixed and ball-milled for 2 hours at a mass ratio of 1:2.04:0.18 (x=0.1), so that the average particle size of the powder is below 30 μm. Put the mixed powder in a cold press mold, pressurize to 400-1000MPa and hold the pressure for 2-4 minutes to form a green body; or put the mixed powder in a cold isostatic press mold, pressurize to 100 ~280MPa and hold the pressure for 2~6 minutes to form a green body. Place the finished green body in a sintering furnace, evacuate to below 10Pa, maintain the vacuum condition or fill in 1 standard atmospheric pressure of hydrogen or nitrogen or argon inert gas, and raise the temperature to 650~650~ at a constant speed of 5~30℃ / min. 900°C, keep it warm for 0.5-12 hours, and then take it out after cooling to room temperature with the furnace, that is, the atomic percentages of Cu, In, Ga, and Se are about 25%, 22.5%, 2.5%, and 50%, respectively, and the comp...

Embodiment 2

[0027] Will Cu 2 Se, In 2 Se 3 , Ga 2 Se 3 The powders (both purity ≥ 99.99%) are mixed and ball-milled for 6 hours at a mass ratio of 1:1.82:0.37 (x=0.2), so that the average particle size of the powder is below 30 μm. According to the method of Example 1, the atomic percentage contents of Cu, In, Ga, and Se are about 25%, 22.5%, 2.5%, and 50%, respectively, with uniform composition and uniform CuIn 1-x Ga x Se 2 phase, a CIGS target with a relative density greater than 90%.

Embodiment 3

[0029] Will Cu 2 Se, In 2 Se 3 , Ga 2 Se 3 The powders (both purity ≥ 99.99%) are mixed and ball-milled for 10 hours at a mass ratio of 1:1.59:0.55 (x=0.3), so that the average particle size of the powder is below 30 μm. Fill the mixed powder evenly in the hot-pressing mold, vacuum the sintering furnace to below 10Pa, keep the vacuum condition or fill it with hydrogen or nitrogen or argon inert gas of 1 standard atmospheric pressure, at a constant speed of 5-30°C / min Rise to 500-900°C, apply 15-40MPa pressure after reaching the temperature, and then keep it warm for 0.5-12 hours, then cool to room temperature with the furnace, take it out after pressure relief, and then get Cu, In, Ga, Se atomic percentages of about 25%, 17.5%, 7.5%, 50%, uniform composition, with uniform CuIn 1-x Ga x Se 2 phase, a CIGS target with a relative density greater than 95%.

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PUM

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Abstract

The invention discloses a Cu-In-Ga-Se or Cu-In-Al-Se solar battery absorbing layer target pertaining to the field of photoelectric functional materials, and a preparation method thereof. High-purity cuprous selenide powder, indium selenide powder, gallium selenide powder or aluminum selenide powder are fully mixed evenly according to the stoichiometric ratio of a CuIn[1-x]GaxSe2 or CuIn[1-x]AlxSe2 solar battery absorbing layer, and then sintered and molded by hot-pressing under protective atmosphere or made into a biscuit after cold press molding or cold isostatic pressing, and the biscuit is sintered under protective atmosphere and certain pressure or does not go through pressure sintering. The technique of the invention is simple and convenient, has high efficiency and low cost, and the produced sputtering target is provided with uniform composition and homogeneous CuIn[1-x]GaxSe2 or CuIn[1-x]AlxSe2 phase, with the relative density more than 90 percent and stable performance. The invention is mainly applied to the preparation of a Cu-In-Ga-Se and Cu-In-Al-Se solar thin film battery absorbing layer.

Description

technical field [0001] The invention belongs to the field of photoelectric functional materials, in particular to a copper indium gallium selenium or copper indium aluminum selenium solar cell absorption layer target material and a preparation method thereof Background technique [0002] Copper indium selenide (CIS) thin-film solar cells have the characteristics of high photoelectric conversion rate, low cost, no performance attenuation, long life, and flexible substrates. It is one of the most promising photovoltaic cell technologies and is very promising in the future. obtain large-scale application. Copper indium selenide (CuInSe) with a chalcopyrite structure 2 ) with a bandgap width of 1.04eV, which is not a semiconductor material for optimum efficiency. Ga, Al, and In belong to Group III elements. Doping an appropriate amount of Ga in CIS, partially replacing In, forms CuIn 1-x Ga x Se 2 (CIGS) The bandgap width is continuously adjustable in the range of 1.04-1.67e...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/34B22F3/12
Inventor 庄大明张弓张宁元金石李春雷宋军
Owner TSINGHUA UNIV
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