Method for preparing spin microscopic micro-cantilever detector method based on electron jet plasma countermark
An electron beam and plasma technology is applied in the field of preparation of resonant spin display micro-cantilever detectors, which can solve the problems of small quality factor and high hardness of AFM oscillator materials, and achieve the effect of high sensitivity
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[0013] SOI substrates are divided into sizes 5×4cm 2 , Silicon dioxide is plated on both sides, and the low-pressure chemical LPCVD method is used at 800 ° C to plate a silicon dioxide film with a thickness of 2000, and subsequent heat treatment is performed.
[0014] The window array is etched on the plated silicon dioxide SOI substrate by plasma RIE etching. The method is to design the array window MASK, the MASK is divided into 4 equal parts on 4 inches, and a 10×50 window array is designed, each window is 5×4mm 2 . MASK is placed on the upper end of the silicon dioxide-plated SOI substrate, and plasma etching is performed at a rate of 50 / sec for 120 minutes to complete the plasma RIE window opening of the substrate.
[0015] Wet etch NaOH solution to etch the WAFER window of the previous plasma window opening. Use a 150ml beaker to hold 50ml of 8% NaOH solution, place it on a magnetic stirrer, immerse the substrate with plasma window opening in the 8% NaOH solution, hea...
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