Preparation of flexible high-resistance multi-layer transparent conductive film

A transparent conductive film, high-resistance technology, applied to conductive layers, coatings, layered products on insulating carriers, etc., can solve the problems of unstable resistance of ITO high-resistance films, short production process flow, and high production efficiency. The film layer is dense, the service life is improved, and the service life is improved.

Inactive Publication Date: 2009-07-08
甘国工
3 Cites 16 Cited by

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Problems solved by technology

[0003] The purpose of the present invention is to propose a method for preparing a flexible high-resistance multi-layer transparent conductive film for the problems of unstable ITO high-resistance film resistance and poor du...
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Abstract

The invention provides a method for preparing a flexible high resistance multi-layer transparent conductive film which includes steps as follows: forming a titanium dioxide layer, a silicon dioxide layer, an indium tin oxide layer, a zinc-aluminium oxide layer or zinc-gallium oxide layer continuously and orderly on one surface of a flexible base material PET polyester film by using a mid-frequency magnetron sputtering technique; temperature reaching to 120 DEG C or more by using heat energy generated by bombardment continuously and deposition of the high-energy particle on the PET polyester film, and controlling oxide-indium atom ratio between 1.26-1.29 for obtaining the indium tin oxide layer with crystal structure; adhibiting another side of the PET polyester with one side of the second layer PET polyester, setting a hard coating on another side of the second layer PET polyester; forming the titanium dioxide layer and the silicon dioxide layer continuously and orderly on the hard coating by using mid-frequency magnetron sputtering technique. The product has better resistance stability and durability, has advantages of short production flow, high efficiency and low cost. The product is not easy to warp in follow processing flow.

Application Domain

Conductive layers on insulating-supportsLayered products +4

Technology Topic

High energy particleOxide +15

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  • Preparation of flexible high-resistance multi-layer transparent conductive film

Examples

  • Experimental program(1)

Example Embodiment

[0020] The inventive method comprises:
[0021] Using intermediate frequency magnetron sputtering technology to successively form titanium dioxide layer 2, silicon dioxide layer 3, indium tin oxide layer 4, zinc aluminum oxide layer or zinc gallium oxide layer 5 on one side of the flexible substrate PET polyester film 1 In the film-forming process of indium tin oxide layer 4, utilize the heat energy that high-energy particles continuously bombard and deposit on PET polyester film 1 when aforementioned titanium dioxide layer 2 and silicon dioxide layer 3 intermediate-frequency magnetron sputtering film-forming, Make the temperature reach 120°C or higher, and control the oxygen-indium atomic ratio (O/In) in the range of 1.26-1.29, so as to obtain the indium tin oxide layer 4 with a crystalline structure;
[0022] The other side of the flexible substrate PET polyester film 1 is bonded to one side of the second layer of PET polyester film 7 through the adhesive layer 6, and a hard coat layer is set on the other side of the second layer of PET polyester film 7. 8;
[0023] A titanium dioxide layer 9 and a silicon dioxide layer 10 are sequentially and continuously formed on the hard coating layer 8 by intermediate frequency magnetron sputtering technology.
[0024] The other side of the flexible substrate PET polyester film 1 is bonded to one side of the second layer of PET polyester film 7 through the adhesive layer 6, and the bonding method can be compounded by a conventional compound machine.
[0025] The structure of the resulting product is that there are titanium dioxide (TiO 2 ) layer 2, silicon dioxide (SiO 2 ) layer 3, transparent conductive crystalline indium tin oxide (ITO) layer 4 and zinc aluminum oxide layer or zinc gallium oxide layer (top layer) 5; the other side of the PET polyester film 1 is connected to the One side of the second layer of flexible substrate PET polyester film 7 is bonded, and the other side of the second layer of PET polyester film 7 is provided with a hard coating 8 and titanium dioxide as an anti-reflection and moisture-proof layer successively from the inside to the outside. (TiO 2 ) layer 9, silicon dioxide (SiO 2 ) layer 10; wherein, the flexible substrate PET polyester film 1 has a thickness of 50 μm, the titanium dioxide layer 2 has a thickness of 120 nm, and the silicon dioxide layer 3 has a thickness of 95 nm; the transparent conductive crystalline indium tin oxide (ITO) layer 4 has a thickness of 15 nm and a surface resistance of 500 Ω / ; the thickness of zinc-aluminum oxide layer or zinc-gallium oxide layer 5 is 5nm, and the surface resistance is 5×10 4 Ω/□; the adhesive layer 6 has a thickness of 10 μm; the second layer of PET polyester film 7 has a thickness of 125 μm; the hard coat layer 8 has a thickness of 3 μm; the titanium dioxide layer 9 has a thickness of 120 nm, and the silicon dioxide layer 10 has a thickness of 95 nm.

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