Preparation of flexible high-resistance multi-layer transparent conductive film

[0020] The inventive method comprises:

[0021] Using intermediate frequency magnetron sputtering technology to successively form titanium dioxide layer 2, silicon dioxide layer 3, indium tin oxide layer 4, zinc aluminum oxide layer or zinc gallium oxide layer 5 on one side of the flexible substrate PET polyester film 1 In the film-forming process of indium tin oxide layer 4, utilize the heat energy that high-energy particles continuously bombard and deposit on PET polyester film 1 when aforementioned titanium dioxide layer 2 and silicon dioxide layer 3 intermediate-frequency magnetron sputtering film-forming, Make the temperature reach 120°C or higher, and control the oxygen-indium atomic ratio (O/In) in the range of 1.26-1.29, so as to obtain the indium tin oxide layer 4 with a crystalline structure;

[0022] The other side of the flexible substrate PET polyester film 1 is bonded to one side of the second layer of PET polyester film 7 through the adhesive layer 6, and a hard coat layer is set on the other side of the second layer of PET polyester film 7. 8;

[0023] A titanium dioxide layer 9 and a silicon dioxide layer 10 are sequentially and continuously formed on the hard coating layer 8 by intermediate frequency magnetron sputtering technology.

[0024] The other side of the flexible substrate PET polyester film 1 is bonded to one side of the second layer of PET polyester film 7 through the adhesive layer 6, and the bonding method can be compounded by a conventional compound machine.

[0025] The structure of the resulting product is that there are titanium dioxide (TiO 2 ) layer 2, silicon dioxide (SiO 2 ) layer 3, transparent conductive crystalline indium tin oxide (ITO) layer 4 and zinc aluminum oxide layer or zinc gallium oxide layer (top layer) 5; the other side of the PET polyester film 1 is connected to the One side of the second layer of flexible substrate PET polyester film 7 is bonded, and the other side of the second layer of PET polyester film 7 is provided with a hard coating 8 and titanium dioxide as an anti-reflection and moisture-proof layer successively from the inside to the outside. (TiO 2 ) layer 9, silicon dioxide (SiO 2 ) layer 10; wherein, the flexible substrate PET polyester film 1 has a thickness of 50 μm, the titanium dioxide layer 2 has a thickness of 120 nm, and the silicon dioxide layer 3 has a thickness of 95 nm; the transparent conductive crystalline indium tin oxide (ITO) layer 4 has a thickness of 15 nm and a surface resistance of 500 Ω / ; the thickness of zinc-aluminum oxide layer or zinc-gallium oxide layer 5 is 5nm, and the surface resistance is 5×10 4 Ω/□; the adhesive layer 6 has a thickness of 10 μm; the second layer of PET polyester film 7 has a thickness of 125 μm; the hard coat layer 8 has a thickness of 3 μm; the titanium dioxide layer 9 has a thickness of 120 nm, and the silicon dioxide layer 10 has a thickness of 95 nm.