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Diamond thin-film grinding method and catalyst grinding wheel thereof

A technology of diamond film and grinding method, which is applied in the direction of grinding machines, abrasive materials, grinding devices, etc., can solve the problems of poor microscopic surface quality, low processing efficiency, film rupture, etc., and achieve compact structure, high processing efficiency and processing accuracy, Easy to use effects

Inactive Publication Date: 2009-08-19
ZHEJIANG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional method has the following disadvantages: low processing efficiency, poor microscopic surface quality, and easy to cause film rupture and damage

Method used

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  • Diamond thin-film grinding method and catalyst grinding wheel thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Refer to attached figure 1 :

[0022] Diamond thin film grinding method, comprises the following steps:

[0023] (1) Mix catalytic abrasive grains and cutting abrasive grains with binder respectively, the respective volume percentages are: abrasive grains 80% to 90%, binder 10% to 20%, stir evenly, of which catalytic abrasive grains account for the total The volume of abrasive grains is 60% to 80%, and cutting abrasive grains account for 40% to 20% of the total abrasive grain volume;

[0024] (2) Manufacture a concentric mold, pour the mixed abrasive grains in the way of catalytic abrasive grains and cutting abrasive grains, the catalytic abrasive grains are located in the outermost layer, and pour into molding;

[0025] (3) Put the grinding tool into the compressor to squeeze and solidify, and then the catalyst grinding wheel is obtained after demoulding.

[0026] (4) When the catalyst grinding wheel processes the workpiece, under the friction and catalysis of the c...

Embodiment 2

[0028] Refer to attached figure 1 :

[0029] This embodiment discloses a catalyst grinding wheel suitable for the diamond film grinding method, and the grinding wheel is composed of catalytic abrasive grains 1 and cutting abrasive grains 2 .

[0030] The catalytic abrasive grains 1 and cutting abrasive grains 2 are distributed in layers of concentric circles, and the catalytic abrasive grains 1 are located in the outermost layer.

[0031] In the grinding wheel, the catalytic abrasive grains 1 and the cutting abrasive grains 2 are bonded in a fixed manner, and the respective volume percentages are: 80% to 90% of the abrasive grains, 10% to 20% of the binder, and each part accounts for the abrasive grains The percentage of the total volume is: 60%-80% of catalytic abrasive grains and 40%-20% of cutting abrasive grains.

[0032] The catalytic abrasive grains 1 can be one of iron, manganese, titanium, aluminum or a mixture of more than one.

[0033] The diameter of the catalyti...

Embodiment 3

[0040] This embodiment proposes a specific formula for the catalytic grinding wheel. The catalytic abrasive grains of this embodiment are 1500# iron powder, the cutting abrasive grains are 1000# single crystal diamond powder, and the binder is 2400# iron powder. The volume percentage of each part is: the abrasive grains account for 80% of the total volume (the volume ratio of catalytic abrasive grains and cutting abrasive grains is 70%:30%), and the binder accounts for 20% of the total volume.

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Abstract

The invention discloses a method for grinding a diamond thin film, which comprises the following steps of: mixing catalytic abrasive grains and cutting abrasive grains with a bonding agent respectively; making a concentric mold, and pouring the catalytic abrasive grains and the cutting abrasive grains into mixed grains in an alternating way; placing the mold in a compressor for extruding and curing, and obtaining a catalytic grinding wheel after demoulding; and processing a workpiece with a catalytic grinding wheel, in which the friction and catalysis of the catalytic abrasive grains reduces the activation required for the graphitization of a CVD diamond thin film, when the catalytic abrasive grains are worn away, the cutting abrasive grains perform graphitization-removing grinding and polishing of non-diamond carbon generated by the graphitization to realize the precision grinding and polishing of the surface of the diamond thin film. The catalytic grinding wheel applicable to the method consists of the catalytic abrasive grains and the cutting abrasive grains. The method has the advantages of strong applicability, compact structure, high machining efficiency and precision, low cost, small negative effect, convenient use and the like.

Description

technical field [0001] The invention mainly relates to precision processing fields such as grinding and polishing, and is especially suitable for a diamond film grinding method and a catalyst grinding wheel for CVD diamond film grinding and polishing. Background technique [0002] The mechanical grinding and polishing of CVD diamond film uses free abrasives or diamond grinding wheels to contact the surface of CVD diamond film to generate a large friction force, which will deform the diamond surface and even break the carbon bond to form debris, so as to achieve the purpose of material removal. However, the traditional method has the following disadvantages: low processing efficiency, poor microscopic surface quality, and easy to cause film rupture and damage. Contents of the invention [0003] In order to overcome the shortcomings of the existing CVD diamond film mechanical grinding and polishing process, the present invention proposes a diamond film grinding method with h...

Claims

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Application Information

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IPC IPC(8): B24B19/22B24D18/00B24D3/34
Inventor 张利文东辉计时鸣徐振浩袁巧玲金明生
Owner ZHEJIANG UNIV OF TECH