Piezoelectric ceramic and piezoelectric element employing it

A technology of piezoelectric ceramics and piezoelectric elements, applied in the field of piezoelectric elements and piezoelectric ceramics, can solve problems such as bad effects, and achieve the effects of improving moisture resistance, increasing dielectric constant, and reducing lead content

Inactive Publication Date: 2009-10-07
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since lead zirconate titanate contains a large amount of lead, there has been concern in recent years about the adverse effects on the global environment, such as the dissolution of lead in acid rain.

Method used

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  • Piezoelectric ceramic and piezoelectric element employing it
  • Piezoelectric ceramic and piezoelectric element employing it
  • Piezoelectric ceramic and piezoelectric element employing it

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0111] (Manufacturing of piezoelectric elements)

[0112] Make the following sequence as figure 1 Piezoelectric element 20 is shown. First, prepare sodium carbonate (Na 2 CO 3 ) powder, potassium carbonate (K 2 CO 3 ) powder, lithium carbonate (Li 2 CO 3 ) powder, niobium oxide (Nb 2 o 5 ) powder, tantalum oxide (Ta 2 o 5 ) powder, strontium carbonate (SrCO 3 ) powder, zirconia (ZrO 2 ) powder and barium carbonate (BaCO 3 )powder. In addition, manganese carbonate (MnCO 3 ) powder as the raw material of the auxiliary component. After sufficiently drying these raw materials, each raw material was weighed so that the composition (molar ratio) of the composite oxide, which is the main component of the piezoelectric ceramic, would be represented by the following formula (9).

[0113] 0.945 (Na 0.57 K 0.38 Li 0.05 )(Nb 0.9 Ta 0.1 )O 3 +0.05SrZrO 3 +0.005Ba(Nb 0.9 Ta 0.1 ) 2 o 6 …(9)

[0114] Then, weigh the MnCO 3 powder so that it becomes 0.5 mass % wit...

Embodiment 2～4

[0128] In addition to adding MnCO 3 Powder, so that the composition of the complex oxide of the above formula (9) as a whole, except that the mass ratio in terms of MnO is the value shown in Table 1, the piezoelectric element was produced in the same manner as in Example 1, and the piezoelectric characteristics were obtained. evaluate. The evaluation results are shown in Table 1.

Embodiment 5

[0130] (Manufacturing of piezoelectric elements)

[0131] In addition to preparing Cu 2 O powder instead of MnCO 3 powder, mixed Cu 2 A piezoelectric element was produced in the same manner as in Example 1, except that the mass ratio of O powder to the entire composition of the composite oxide of the above formula (9) was 1.0% by mass in terms of CuO.

[0132] (microstructure observation and component analysis)

[0133] Similar to Example 1, STEM-EDS was used to observe the microstructure and analyze the components of the obtained piezoelectric ceramics. Figure 4 It is a STEM (scanning transmission electron microscope) photograph of the microstructure of the piezoelectric ceramic of Example 5. Figure 9 It's a sign of expansion Figure 4 The STEM (scanning transmission electron microscope) photograph near the grain boundary of the piezoelectric ceramic shown.

[0134] Figure 10 yes Figure 9 The graph of the FE-STEM and EDS analysis results of each point of the piezo...

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PUM

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Abstract

A piezoelectric ceramic (1) in a piezoelectric element (20) contains, as a major component, a composition containing one or more complex oxides with metal elements other than lead as constituent elements. At least one of the complex oxides includes an alkali metal and Nb as constituent elements. Also, either or both of the elements Mn and Cu are segregated at the grain boundaries of the composition.

Description

technical field [0001] The present invention relates to a piezoelectric ceramic and a piezoelectric element using the piezoelectric ceramic. Background technique [0002] It is known that piezoelectric ceramics are mechanically deformed and stressed by an electric field, and the so-called piezoelectric effect occurs. Such piezoelectric ceramics are used in vibrating elements such as drivers, sounding bodies, and sensors. [0003] Actuators using piezoelectric ceramics are capable of obtaining high-precision micro-displacements and are characterized by large stresses, and are used, for example, to determine the position of precision machine tools and optical devices. Lead zirconate titanate (PZT), which has excellent piezoelectric characteristics, is often used as piezoelectric ceramics used in actuators. However, since lead zirconate titanate contains a large amount of lead, there has been concern in recent years about adverse effects on the global environment such as elut...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): C04B35/01C04B35/495H01L41/187C04B35/00H01L41/083H01L41/22H01L41/39H02N2/00
CPCC04B2235/768C04B2235/3206C04B2235/3281C04B2235/3201C04B2235/85H01L41/43C04B2235/3215C04B2235/3208H01L41/083C04B2235/3213C04B35/495H01L41/1873C04B35/62695C04B2235/3248C04B2235/3203C04B2235/3262C04B2235/3255C04B2235/3236H10N30/50H10N30/8542H10N30/097
Inventor古川正仁塚田岳夫田中大介坂本典正
OwnerTDK CORPARATION