Micromechanical terahertz waveguide, terahertz waveguide type resonant cavity and preparation method thereof
A terahertz, micro-mechanical technology, applied in optical waveguides, waveguides, resonators, etc., can solve the problems of difficult to ensure circuit operating characteristics and yield, long time consumption, high processing accuracy requirements, etc., to achieve large-scale parallelization Processing, shape flexibility and variety of effects
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[0040]The present invention will be further described in detail below in conjunction with the drawings and specific embodiments:
[0041] figure 1 The basic structure of the micromechanical terahertz waveguide embedded in the low-temperature co-fired ceramic substrate of the present invention is shown. In the figure, the LTCC package substrate is composed of three-layer substrates 1a, 1b, and 1c. The above-mentioned flat substrates are stacked parallel to each other. The upper surface plate 1a and the lower surface plate 1c are processed by a bulk micromachining process with vertical axes. The waveguides 2a and 2b on the upper surface plate 1a and the lower surface plate 1c are used for signal input / output; the middle substrate 1b is fabricated with a rectangular cross-section waveguide 3 whose axis is parallel to the direction of the substrate, and the inner wall of all the waveguides is coated with High-conductivity metals such as Au, Ag or Cu are used to guide the propagation...
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