Vacuum annealing method for tantalum tube
A tantalum tube annealing technology, applied in furnaces, heat treatment equipment, heat treatment furnaces, etc., can solve the problems of poor structure and performance of tantalum tubes, achieve good structure and performance, large temperature gradient, and improve surface properties
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[0018] In order to further illustrate the present invention, the preferred examples of the present invention will be described below with reference to the accompanying drawings and embodiments, and the objectives, features and advantages of the present invention can be clearly seen.
[0019] Referring to the drawings, the steps of the present invention are as follows:
[0020] 1. Cleaning: Clean the tantalum tube (Ta1) with an outer diameter of 20mm, a wall thickness of 1mm, and a length of 800mm, and dry it. Ensure that the inner and outer walls of the tantalum tube are free of oil and water marks.
[0021] 2. Loading: Put the cleaned batch of tantalum tubes into the heat-resistant material sleeve first, and then send them into the vacuum annealing furnace along the axial direction by the automatic transmission device, and the automatic transmission device stops working.
[0022] 3. Vacuum pumping: first turn on the mechanical pump and pump it to a vacuum of 10 3 At Pa, turn on t...
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