Driving micro pump of photoinduced bending film

Abstract

The invention discloses a driving micro pump of a photoinduced bending film, which belongs to the technical field of micro mechanics. The micro pump mainly comprises a pump film, a pump cavity, an inlet, an outlet and the like, wherein the pump film of the micro pump is formed by partially compounding a photoinduced bending deforming material layer and a flexible polymer material layer; and the pump film periodically heaves and restores by periodically irradiating ultraviolet light and visible light. The driving micro pump has the advantages of simple structure and process, low power consumption, easy operation and control and long service life.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanics, and in particular relates to a micropump driven by a light-induced bending film. Background technique [0002] The micro-flow system can accurately detect and control the flow rate of microliters per minute. At the same time, due to its small size, it can reduce the invalid volume in the micro-flow system, reduce energy consumption and reagent consumption, and has a fast response. Among them, as an important micro-actuator, the micro-pump can be widely used in drug delivery, DNA synthesis, micro-fluid supply and precise control, chip cooling system, micro-dialysis, micro-propulsion and micro-satellite, etc. as the core part of the system micropump. At present, there are more thin-film compression micropumps, and its flow control is realized by driving the reciprocating motion of the membrane to cause the volume change of the pump cavity. The driving principles of the driving film includ...

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Problems solved by technology

The piezoelectric vibrator can withstand low voltage, small deformation, and relatively weak carrying capacity; the electrostatic type requires a high voltage, often hundreds of volts, and the electrostatic driving force is usually small, and the displacement of the vibrating film is small, the maximum is only about The electromagnetic type is mainly limited by the difficulty of making miniature electromagnetic coils, and most electromagnetic devices require the current wires to be perpendicular to the moving parts, which is difficult for the planar manufacturing technology of silicon materials; thermopneumatic and Due to the influence of the thermal characteristics of the gas, the heat flow type is difficult to increase the driving frequency of the pump, and the corresponding pump flow rate is also small; the bimetallic type is driven by the thermal effect, and the heat dissipation is relatively slow due to the heat capacity of the liquid, so the bimetallic micropump The response speed is very slow, and the working frequency is very low (generally lower than 10Hz), which limits its performance; the shape memory alloy type needs a cooling system to make the shape memory alloy experience the opposite deformation and return to its original shape, so special consideration needs to be given to the diffusion of heat, and the thermal energy Very inefficient conversion into mechanical energy

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