Zinc-lithium alloy material and preparation method thereof

A technology of lithium alloy and manufacturing method, which is applied in the field of metal alloy preparation, can solve the problems of not obtaining high-content lithium alloy, environmental pollution, and affecting the formation of alloys, etc., and achieve the effect of dense structure, uniform composition, and high lithium content

Inactive Publication Date: 2010-06-23
BEIJING INST OF NONFERROUS METALS & RARE EARTH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, lithium is a low-melting-point metal with extremely active chemical properties. It will be rapidly oxidized in the air, and it can react with most commonly used crucible materials in the molten state. Oxygen causes oxidation and serious burning loss, which affects the formation of alloys in metals
Using conventional methods to prepare alloys not only cannot obtain high-content lithium alloys, but also easily causes environmental pollution

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Embodiment 1: the zinc-lithium alloy that preparation lithium content is 0.52%

[0030] The preparation process is as follows:

[0031] 1) be 0.6% by mass percentage of lithium, zinc is the proportioning weighing raw material of surplus, wherein the purity of Zn ≥ 5N, the purity ≥ 5N of Li;

[0032] 2) Put zinc into a high-purity graphite crucible, and then put the crucible into a vacuum furnace; wrap lithium with high-purity zinc foil (purity ≥ 5N), and put it into a vacuum furnace hopper;

[0033] 3) Vacuumize to 170Pa;

[0034] 4) Heat up to 490°C to melt the zinc;

[0035] 5) Fill the vacuum furnace with argon to a pressure of 0.95 atmospheres;

[0036] 6) adding lithium;

[0037] 7) Control the melt temperature so that it is not higher than 600°C and refine the zinc-lithium melt for 10 minutes;

[0038] 8) Casting in a water-cooled copper mold.

[0039] Composition analysis was carried out using an ICP analyzer, and the composition mass percentage of the prep...

Embodiment 2

[0040] Example 2: Preparation of zinc-lithium alloy sputtering target

[0041] Utilize the zinc-lithium alloy prepared in embodiment 1 to prepare a sputtering target, the method is as follows:

[0042] The zinc-lithium alloy ingot obtained in Example 1 is heated to 130° C. with a box-type heating furnace, and after being kept warm for 1 hour, the rolling mill is rolled and the rolling processing amount is about 40%, and it is flattened with a hot press, and pressed The flat temperature is the same as the rolling temperature, and it is stretched to a size of 260mm x 240mm x 10mm. Turn and mill the press-processed alloy ingot according to the required size standard to form a sputtering target;

[0043] Use hydrochloric acid solution with a pH of 1.5 to wash by soaking and stirring to remove the pollution caused during the processing, make the surface of the sputtering target clean and bright, and overcome the problem that the target is not easy to glow (arc) during use.

Embodiment 3

[0044] Embodiment 3: the zinc-lithium alloy that preparation lithium content is 3.07%

[0045] The preparation process is as follows:

[0046] 1) be 3.50% by mass percentage of lithium, zinc is the proportioning weighing raw material of surplus, wherein the purity of Zn ≥ 5N, the purity ≥ 5N of Li;

[0047] 2) Put the zinc into the high-purity graphite crucible, and then put the crucible into the vacuum furnace; wrap the lithium with high-purity zinc foil, and put it into the hopper of the vacuum furnace.

[0048] 3) Vacuumize to 190Pa;

[0049] 4) Heat up to 480°C to melt the zinc;

[0050] 5) Fill the vacuum furnace with argon to a pressure of 0.9 atmospheres;

[0051] 6) adding lithium;

[0052] 7) Control the temperature change of the melt so that it is not higher than 650°C and refine the zinc-lithium melt for 10 minutes;

[0053] 8) Casting in a water-cooled copper mold.

[0054] Composition analysis was carried out using an ICP analyzer, and the composition mass p...

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PUM

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Abstract

The invention discloses a zinc-lithium alloy material and a preparation method thereof. The content of lithium is 0.5-4.0% (by mass) in the zinc-lithium alloy material and the balance is Zn. The invention also discloses a technology of producing plasma sputtering target materials used in the silicon chip of an integrated circuit. The preparation method of the zinc-lithium alloy comprises the following steps: weighing high purity lithium and high purity zinc with the content of lithium 10-20% higher than the required ratio; putting the zinc into a high purity graphite crucible, putting the crucible into a vacuum furnace, wrapping the lithium with high purity zinc foil and placing the wrapped lithium into the feed hopper of the vacuum furnace; vacuum pumping; raising the temperature to 450-500 DEG C to melt the zinc; filling argon; adding the high purity lithium and refining for 10-15 minutes at the temperature of 600-650 DEG C; and casting to obtain the zinc-lithium alloy material.

Description

technical field [0001] The invention relates to a metal alloy preparation technology, in particular to a zinc-lithium alloy material and a preparation method thereof, as well as a technology for producing target materials using the alloy. Background technique [0002] Zinc alloy target is used in plasma sputtering of silicon wafers for large-scale integrated circuits, and is a key material for the manufacture of high-reliability integrated circuits and devices. [0003] The general method for preparing zinc alloys is to put all the alloying elements in a crucible for alloying in a vacuum or non-vacuum state. However, lithium is a low-melting-point metal with extremely active chemical properties. It will be rapidly oxidized in the air, and it can react with most commonly used crucible materials in the molten state. Oxygen causes oxidation and serious burning loss, which affects the formation of alloys in metals. The conventional method of preparing alloys not only cannot ob...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C18/00C22C1/02B22D21/02C23C14/34C23C14/14B23P15/00
Inventor 章明溪黄小凯
Owner BEIJING INST OF NONFERROUS METALS & RARE EARTH
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