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Preparation method of composite coating used for gas bearing

A composite coating, dynamic pressure air bearing technology, applied in the direction of bearings, coatings, shafts and bearings, etc., can solve problems such as melting lock, collision between stator and rotor, etc.

Inactive Publication Date: 2010-08-11
UNIV OF SCI & TECH BEIJING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The present invention mainly adopts Ti / AlTiN / Ti:DLC composite film with high hardness and high wear resistance to solve the friction problem between the rotor and the stator of the dynamic pressure air bearing and during the high-speed rotation process, the stator and the rotor may collide or even melt instantly. dead failure

Method used

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  • Preparation method of composite coating used for gas bearing
  • Preparation method of composite coating used for gas bearing
  • Preparation method of composite coating used for gas bearing

Examples

Experimental program
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Effect test

Embodiment 1

[0034] The Ti / AlTiN / Ti:DLC composite film with high hardness and high wear resistance is deposited by an intermediate frequency reactive magnetron sputtering system, and the target material is a Ti and AlTi alloy target with a purity of 99.9% (Al:Ti=67:33 (atm%) ), the purity of nitrogen and argon is >99.9%, the air pressure in the steel cylinder is greater than 10MPa; the background pressure of the vacuum chamber is less than 3×10 -4 Pa, the cooling water outlet temperature is lower than 25°C, the return water temperature is lower than 40°C, and the revolution speed of the workpiece holder is continuously adjustable within the range of 0-20 rpm. Cleaning of the workpiece to be plated and clamping of the workpiece: Ultrasonic cleaning and dehydration of the workpiece to be plated are carried out with detergent, deionized water, acetone, and absolute ethanol respectively. The cleaning time is 10-20min each time, and the power density is 40W / piece. After drying, transfer to the ...

Embodiment 2

[0038] The Ti / AlTiN / Ti:DLC composite film with high hardness and high wear resistance is deposited by an intermediate frequency reactive magnetron sputtering system, and the target material is a Ti and AlTi alloy target with a purity of 99.9% (Al:Ti=67:33 (atm%) ), the purity of nitrogen and argon is >99.9%, the air pressure in the steel cylinder is greater than 10MPa; the background pressure of the vacuum chamber is less than 3×10 -4 Pa, the cooling water outlet temperature is lower than 25°C, the return water temperature is lower than 40°C, and the revolution speed of the workpiece holder is continuously adjustable within the range of 0-20 rpm. Cleaning of the workpiece to be plated and clamping of the workpiece: Ultrasonic cleaning and dehydration of the workpiece to be plated are carried out with detergent, deionized water, acetone, and absolute ethanol respectively. The cleaning time is 10-20min each time, and the power density is 50W / piece. After drying, transfer to the ...

Embodiment 3

[0042] The Ti / AlTiN / Ti:DLC composite film with high hardness and high wear resistance is deposited by an intermediate frequency reactive magnetron sputtering system, and the target material is a Ti and AlTi alloy target with a purity of 99.9% (Al:Ti=67:33 (atm%) ), the purity of nitrogen and argon is >99.9%, the air pressure in the steel cylinder is greater than 10MPa; the background pressure of the vacuum chamber is less than 3×10 -4 Pa, the cooling water outlet temperature is lower than 25°C, the return water temperature is lower than 40°C, and the revolution speed of the workpiece holder is continuously adjustable within the range of 0-20 rpm. Cleaning of the workpiece to be plated and clamping of the workpiece: Ultrasonic cleaning and dehydration of the workpiece to be plated are carried out with detergent, deionized water, acetone, and absolute ethanol respectively. The cleaning time is 10-20min each time, and the power density is 40-60W / piece . After drying, transfer to...

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Abstract

The invention discloses a preparation method of a composite coating used for a gas bearing, which adopts a mid-frequency reactive magnetron sputtering system to deposit a Ti / AlTiN / Ti: DLC high- hardness and high-abrasion-resistance composite membrane. The smaller the friction coefficient between a rotor and a stator of the dynamic gas bearing is, the better to the starting of a motor, and in the high-speed rotation process, the stator and the rotor can possibly collide with each other or even have instant melting lock faults. The dynamic gas bearing made of single material can not satisfy the current requirements, and the surface modification technique of the bearing material is the key technology that limits the application of the dynamic gas bearing. The coating prepared through the method reduces the friction coefficient, improves the abrasion resistance and at the same time solves the problems of corrosion resistance and abrasive resistance of the coating. The preparation method is easy to realize and all the materials are common, so the preparation method can realize industrial production.

Description

technical field [0001] The invention relates to the preparation of a hard wear-resistant coating, in particular to the preparation of a low-friction, high-abrasion-resistant and corrosion-resistant composite coating used for air bearing surface modification. Background technique [0002] The smaller the coefficient of friction between the rotor and the stator of the dynamic pressure air bearing, the more favorable it is for the motor to start. During high-speed rotation, the stator and the rotor may collide or even instantly melt and lock. The contact friction at the moment of starting and stopping has a significant impact on the life of the air bearing. Single-material dynamic pressure air bearings can no longer meet the current needs, and the surface modification technology of bearing materials is one of the key technologies that limit its application. At present, the research on air bearings mainly focuses on the design of structure, base material and accessory parts. Fo...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/14C23C14/02F16C32/06
Inventor 庞晓露杨会生高克玮王燕斌
Owner UNIV OF SCI & TECH BEIJING
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