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Micro-nano fluid system and preparation method thereof

A fluid system, micro-nano technology, applied in the field of micro-nano fluid system and its preparation, can solve the problems of weak control performance, single function, limited characterization means, etc., and achieve the effect of compact structure, high test accuracy and effective thermal conductivity

Inactive Publication Date: 2013-12-11
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Micro-nanofluidic systems have developed relatively maturely in biology and chemistry. Lab-on-a-chip (A.Manz, et al., Miniaturized total chemical analysis systems: a novel concept for chemical sensing, Sensors and Actuators B, 1(1990), 244) and micro total analytical system (Weiwei Gong, Shengyong Xu, et al., Room temperature synthesis of K 2 Mo 3 o 10 ·3H 2 O nanowires in minutes, Nanotechnology, 20(2009), 215603) has been well known in the industry, but at this stage this type of system is mainly prepared by MEMS technology, and the function is relatively single, the control performance is weak, and the means of characterization are limited. In terms of fluids, because of the emerging discipline, many basic issues have not yet been clearly concluded

Method used

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  • Micro-nano fluid system and preparation method thereof
  • Micro-nano fluid system and preparation method thereof
  • Micro-nano fluid system and preparation method thereof

Examples

Experimental program
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Embodiment 1

[0046] 1) Design and prepare mask plates A and B and use mask plates A and B to prepare thin-film thermocouple array layers:

[0047] Design masks A and B according to the following requirements of the thin-film thermocouple array layer: the thermocouple array layer is composed of a thin-film thermocouple array, and the array is a 3*3 (3 thin-film thermocouples in each column, 3 columns in total) array; Each thermocouple has two arms, the width of the main part of each arm is 50 μm, and the distance between the two arms of each thermocouple is 60 μm, and the distance between two adjacent thermocouples is 3mm; each The overlapping area of ​​the two arms of each thermocouple is used as the hot end, which is a square of 20 μm×20 μm, and the width of the thermocouple arms near the hot end is changed from 50 μm to 20 μm; the other end of the thermocouple is used as the cold end, and each thermocouple’s The two arms are respectively led out to two lead-out electrodes with a size of ...

Embodiment 2

[0064] Carry out step 1)-step 4) according to step 1)-step 4) in embodiment 1 identical step;

[0065] 5) After placing a new molybdate nanowire (100 μm in length and 150 nm in diameter) on the insulating layer b obtained in step 4), prepare the micro-nano channel layer according to the following steps a-step e:

[0066] a, select the negative glue SU-8 that the model that MicroChem company sells is 3010, prepare the SU-8 glue layer with the spin coating method, the uniform glue parameter is the rotating speed 3000rpm, and the spin coating time is 30s, placed molybdate nanowire Spin coating on the insulating layer b to obtain a SU-8 adhesive layer with a thickness of 10 μm;

[0067] b. Dry the SU-8 adhesive layer obtained in step a at 95°C for 3 minutes, then dry it for 2 minutes after exposure for 15 seconds, and develop it with SU-8 developer for 3 minutes. Since the nanowires are water-soluble, after the above development steps , and dry to obtain a micro-nano channel laye...

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Abstract

The invention discloses a method for preparing a micro-nano fluid system. The method comprises the following steps of: (1) preparing a film thermocouple array on a substrate to obtain a film thermocouple array layer; (2) preparing an insulating layer a on the prepared film thermocouple array layer prepared in the step 1), and preparing a field modulation layer on the insulating layer a; and 3) preparing an insulating layer b on the field modulation layer prepared in the step 2), preparing a micro-nano channel layer on the insulating layer b, and packaging to prepare the micro-nano fluid system. The prepared micro-nano fluid testing system has local temperature measurement and control function and can perform direct current and high-frequency electromagnetic measurement. The system is diversified in function, compact in structure and high in testing accuracy, and has good application prospects in the research fields of physics, chemistry, biology and the like.

Description

technical field [0001] The invention relates to a micro-nano fluid system and a preparation method thereof. Background technique [0002] With the development and wide application of micro-nanofluids in the fields of physics, chemistry, biology, etc., the requirements for micro-nanofluid chips in natural sciences are also getting higher and higher, especially in recent years, nanofluidics (objects with a characteristic scale of 100nm The research and application of internal or surrounding fluids) has attracted much attention because of its obvious scale effect, which can realize the analysis and research of single molecules. At present, the fields of biology and chemistry have made some contributions in the reaction and analysis of trace substances with the help of micro-nano systems, but it is foreseeable that the micro-nano flow system will have a longer-term development. The simulation and observation of the ion transport behavior in the phenomenon will produce inestimab...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B1/00B01L3/00B81C1/00B82Y30/00B82Y40/00G01R27/22G01R27/02
Inventor 许胜勇庄虔伟吴修栋刘海啸龚巍巍薛炯微孙伟强
Owner PEKING UNIV
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